Herbert E. Litvak

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for chemical monitoring
- Patent number 7,580,119
- Issue date Aug 25, 2009
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for chemical monitoring
- Patent number 7,456,939
- Issue date Nov 25, 2008
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Grant
Optical control interface between controller and process chamber
- Patent number 7,217,371
- Issue date May 15, 2007
- Lightwind Corporation
- Herbert E. Litvak
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for chemical monitoring
- Patent number 7,072,028
- Issue date Jul 4, 2006
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for accurate endpoint detection in supported polishing pads
- Patent number 6,641,470
- Issue date Nov 4, 2003
- Lam Research Corporation
- Eugene Y. Zhao
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for end point triggering with integrated steering
- Patent number 6,612,902
- Issue date Sep 2, 2003
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing device with movable window
- Patent number 6,254,459
- Issue date Jul 3, 2001
- Lam Research Corporation
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing device with movable window
- Patent number 6,068,539
- Issue date May 30, 2000
- Lam Research Corporation
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Photoresist coating process control with solvent vapor sensor
- Patent number 6,027,760
- Issue date Feb 22, 2000
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CHEMICAL MONITORING
- Publication number 20090075403
- Publication date Mar 19, 2009
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Chemical Monitoring
- Publication number 20070064227
- Publication date Mar 22, 2007
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING
Information Patent Application
Optical control interface between controller and process chamber
- Publication number 20050078300
- Publication date Apr 14, 2005
- Lightwind Corporation
- Herbert E. Litvak
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for chemical monitoring
- Publication number 20050046825
- Publication date Mar 3, 2005
- Lightwind Corporation
- Gary B. Powell
- G01 - MEASURING TESTING

Herbert E. Litvak

Person

Patents Grantslast 30 patents

Method and apparatus for chemical monitoring

Method and apparatus for chemical monitoring

Optical control interface between controller and process chamber

Method and apparatus for chemical monitoring

Apparatus for accurate endpoint detection in supported polishing pads

Method and apparatus for end point triggering with integrated steering

Wafer polishing device with movable window

Wafer polishing device with movable window

Photoresist coating process control with solvent vapor sensor

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CHEMICAL MONITORING

Method and Apparatus for Chemical Monitoring

Optical control interface between controller and process chamber

Method and apparatus for chemical monitoring