Herbert Palm

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Wappingers Falls, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Application of thin crystalline Si.sub.3 N.sub.4 liners in shallow...
- Patent number 5,747,866
- Issue date May 5, 1998
- Siemens Aktiengesellschaft
- Herbert Ho
- H01 - BASIC ELECTRIC ELEMENTS