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Herbert Struyf
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Kontich, BE
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Patents Grants
last 30 patents
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Patent Grant
High aspect ratio via etch
Patent number
7,807,583
Issue date
Oct 5, 2010
IMEC
Joke Van Aelst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual damascene patterning method
Patent number
7,611,986
Issue date
Nov 3, 2009
IMEC
Jan Van Olmen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Anisotropic etching of organic-containing insulating layers
Patent number
6,844,266
Issue date
Jan 18, 2005
Interuniversitair Microelektronica Centrum
Karen Maex
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for stripping ion implanted photoresist layer
Patent number
6,352,936
Issue date
Mar 5, 2002
Imec VZW
Christian Jehoul
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
HIGH ASPECT RATIO VIA ETCH
Publication number
20080050919
Publication date
Feb 28, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Joke Van Aelst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Dual damascene patterning method
Publication number
20060264033
Publication date
Nov 23, 2006
Jan Van Olmen
H01 - BASIC ELECTRIC ELEMENTS