Herbert Terhorst

Person

People

Patents Grantslast 30 patents

Information Patent Grant
Batch furnace assembly and method of operating a batch furnace asse...
- Patent number 11,971,217
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Reactant vaporizer and related systems and methods
- Patent number 11,926,894
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate susceptor using edge purging
- Patent number 11,404,302
- Issue date Aug 2, 2022
- ASM IP Holding B.V.
- Raj Singu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 10,844,486
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for dispensing a vapor phase reactant to a reaction chamb...
- Patent number 10,844,484
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Lucian Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply manifold and method of supplying gases to chamber using...
- Patent number 10,683,571
- Issue date Jun 16, 2020
- ASM IP Holding B.V.
- Lucian C. Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Assembly of a liner and a flange for a vertical furnace as well as...
- Patent number 10,605,530
- Issue date Mar 31, 2020
- ASM IP Holding B.V.
- Lucian C. Jdira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 10,480,072
- Issue date Nov 19, 2019
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction system for growing a thin film
- Patent number 10,468,291
- Issue date Nov 5, 2019
- ASM America, Inc.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 10,370,761
- Issue date Aug 6, 2019
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 10,266,946
- Issue date Apr 23, 2019
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 9,574,268
- Issue date Feb 21, 2017
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive curing process for semiconductor substrates
- Patent number 9,431,238
- Issue date Aug 30, 2016
- ASM IP Holding B.V.
- Bert Jongbloed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing reactor and components thereof
- Patent number 9,394,608
- Issue date Jul 19, 2016
- ASM America, Inc.
- Eric Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction system for growing a thin film
- Patent number 9,359,672
- Issue date Jun 7, 2016
- ASM America, Inc.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for high-throughput atomic layer deposition
- Patent number 9,238,867
- Issue date Jan 19, 2016
- ASM International N.V.
- Ernst H. A. Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 8,215,264
- Issue date Jul 10, 2012
- ASM Genitech Korea Ltd.
- Kyung Il Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction system for growing a thin film
- Patent number 8,211,230
- Issue date Jul 3, 2012
- ASM America, Inc.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 7,976,898
- Issue date Jul 12, 2011
- ASM Genitech Korea Ltd.
- Kyung Il Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the heat treatment of substrates
- Patent number 7,410,355
- Issue date Aug 12, 2008
- ASM International N.V.
- Ernst H. A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for purging seals in a thermal reactor
- Patent number 7,128,570
- Issue date Oct 31, 2006
- ASM International N.V.
- Theodorus Gerardus Maria Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilevel pedestal for furnace
- Patent number 6,902,395
- Issue date Jun 7, 2005
- ASM International, N.V.
- Theodorus Gerardus Maria Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the treatment of substrates
- Patent number 6,770,851
- Issue date Aug 3, 2004
- ASM International N.V
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing porous structures
- Patent number 6,759,325
- Issue date Jul 6, 2004
- ASM Microchemistry OY
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating a wafer
- Patent number 6,551,404
- Issue date Apr 22, 2003
- ASM International N.V
- Gert-Jan Snijders
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH-THROUGHPUT SILICON CARBIDE REACTOR
- Publication number 20240175130
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Hichem M’Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR ASSEMBLY
- Publication number 20240145262
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240068097
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE WITH WAFER EDGE PURGING
- Publication number 20230207377
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Rohan Vijay Rane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR GAS DISTRIBUTION
- Publication number 20230088313
- Publication date Mar 23, 2023
- ASM IP HOLDING, B.V.
- Herbert Terhorst
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...
- Publication number 20230008131
- Publication date Jan 12, 2023
- ASM IP HOLDING, B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES PROVIDED WITH AN...
- Publication number 20230008684
- Publication date Jan 12, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL VAPOR DEPOSPITION FURNACE FOR DEPOSITING FILMS
- Publication number 20230002889
- Publication date Jan 5, 2023
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH FURNACE ASSEMBLY AND METHOD OF OPERATING A BATCH FURNACE ASSE...
- Publication number 20220412652
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE SUSCEPTOR USING EDGE PURGING
- Publication number 20220380895
- Publication date Dec 1, 2022
- ASM IP HOLDING B.V.
- Raj Singu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANIFOLDS FOR UNIFORM VAPOR DEPOSITION
- Publication number 20220349060
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR
- Publication number 20220162751
- Publication date May 26, 2022
- ASM IP HOLDING B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY AND COMPONENTS
- Publication number 20210214846
- Publication date Jul 15, 2021
- ASM IP HOLDING B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUSCEPTOR USING EDGE PURGING
- Publication number 20200373187
- Publication date Nov 26, 2020
- ASM IP HOLDING B.V.
- Raj Singu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF
- Publication number 20200056286
- Publication date Feb 20, 2020
- ASM IP HOLDING, B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A REACTION CHAMB...
- Publication number 20190093221
- Publication date Mar 28, 2019
- ASM IP HOLDING B.V.
- Lucian Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASSEMBLY OF A LINER AND A FLANGE FOR A VERTICAL FURNACE AS WELL AS...
- Publication number 20190032998
- Publication date Jan 31, 2019
- ASM IP HOLDING B.V.
- Lucian C. Jdira
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS
- Publication number 20180094351
- Publication date Apr 5, 2018
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED VALVE MANIFOLD FOR ATOMIC LAYER DEPOSITION
- Publication number 20170121818
- Publication date May 4, 2017
- ASM AMERICA, INC
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE CURING PROCESS FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20170011910
- Publication date Jan 12, 2017
- ASM IP HOLDING B.V.
- Bert Jongbloed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF
- Publication number 20160289828
- Publication date Oct 6, 2016
- ASM IP HOLDING, B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION SYSTEM FOR GROWING A THIN FILM
- Publication number 20160233124
- Publication date Aug 11, 2016
- ASM America, Inc,
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE CURING PROCESS FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20150357184
- Publication date Dec 10, 2015
- ASM IP HOLDING B.V.
- Bert Jongbloed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Supply Manifold And Method Of Supplying Gases To Chamber Using...
- Publication number 20150240359
- Publication date Aug 27, 2015
- ASM IP HOLDING B.V.
- Lucian C. Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION SYSTEM FOR GROWING A THIN FILM
- Publication number 20120266821
- Publication date Oct 25, 2012
- ASM AMERICA, INC
- Mohith Verghese
- C30 - CRYSTAL GROWTH
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20110308460
- Publication date Dec 22, 2011
- ASM GENITECH KOREA LTD.
- Kyung Il Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION
- Publication number 20110268879
- Publication date Nov 3, 2011
- Ernst H. A. Granneman
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF
- Publication number 20100307415
- Publication date Dec 9, 2010
- Eric Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER
- Publication number 20100116207
- Publication date May 13, 2010
- ASM AMERICA, INC
- Michael Givens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20080069955
- Publication date Mar 20, 2008
- ASM GENITECH KOREA LTD.
- Kyung Il Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Herbert Terhorst

Person

Patents Grantslast 30 patents

Batch furnace assembly and method of operating a batch furnace asse...

Reactant vaporizer and related systems and methods

Substrate susceptor using edge purging

Semiconductor processing reactor and components thereof

Apparatus for dispensing a vapor phase reactant to a reaction chamb...

Gas supply manifold and method of supplying gases to chamber using...

Assembly of a liner and a flange for a vertical furnace as well as...

Semiconductor processing reactor and components thereof

Reaction system for growing a thin film

Pulsed valve manifold for atomic layer deposition

Pulsed valve manifold for atomic layer deposition

Pulsed valve manifold for atomic layer deposition

Reactive curing process for semiconductor substrates

Semiconductor processing reactor and components thereof

Reaction system for growing a thin film

Apparatus and method for high-throughput atomic layer deposition

Atomic layer deposition apparatus

Reaction system for growing a thin film

Atomic layer deposition apparatus

Method for the heat treatment of substrates

Method and apparatus for purging seals in a thermal reactor

Multilevel pedestal for furnace

Method and apparatus for the treatment of substrates

Sealing porous structures

Apparatus for treating a wafer

Patents Applicationslast 30 patents

HIGH-THROUGHPUT SILICON CARBIDE REACTOR

GAS INJECTOR ASSEMBLY

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING DEVICE WITH WAFER EDGE PURGING

SYSTEM AND APPARATUS FOR GAS DISTRIBUTION

CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...

APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES PROVIDED WITH AN...

CHEMICAL VAPOR DEPOSPITION FURNACE FOR DEPOSITING FILMS

BATCH FURNACE ASSEMBLY AND METHOD OF OPERATING A BATCH FURNACE ASSE...

SUBSTRATE SUSCEPTOR USING EDGE PURGING

MANIFOLDS FOR UNIFORM VAPOR DEPOSITION

SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR

SHOWERHEAD ASSEMBLY AND COMPONENTS

SUBSTRATE SUSCEPTOR USING EDGE PURGING

SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF

APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A REACTION CHAMB...

ASSEMBLY OF A LINER AND A FLANGE FOR A VERTICAL FURNACE AS WELL AS...

REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS

PULSED VALVE MANIFOLD FOR ATOMIC LAYER DEPOSITION

REACTIVE CURING PROCESS FOR SEMICONDUCTOR SUBSTRATES

SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF

REACTION SYSTEM FOR GROWING A THIN FILM

REACTIVE CURING PROCESS FOR SEMICONDUCTOR SUBSTRATES

Gas Supply Manifold And Method Of Supplying Gases To Chamber Using...

REACTION SYSTEM FOR GROWING A THIN FILM

ATOMIC LAYER DEPOSITION APPARATUS

APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION

SEMICONDUCTOR PROCESSING REACTOR AND COMPONENTS THEREOF

REACTION CHAMBER

ATOMIC LAYER DEPOSITION APPARATUS