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Hergen Kapels
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Neubiberg, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Micromechanical component and process for its fabrication
Patent number
6,556,418
Issue date
Apr 29, 2003
Infineon Technologies AG
Robert Aigner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method for micromechanical components
Patent number
6,406,933
Issue date
Jun 18, 2002
Infineon Technologies AG
Robert Aigner
G01 - MEASURING TESTING
Information
Patent Grant
Micromechanical component protected from environmental influences
Patent number
6,401,544
Issue date
Jun 11, 2002
Infineon Technologies AG
Robert Aigner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for fabricating integrated sensors
Patent number
6,346,429
Issue date
Feb 12, 2002
Infineon Technologies AG
Robert Aigner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Rotation rate sensor
Patent number
6,094,985
Issue date
Aug 1, 2000
Siemens Aktiengesellschaft
Hergen Kapels
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Micromechanical component protected from environmental influences
Publication number
20010054315
Publication date
Dec 27, 2001
Robert Aigner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical component and process for its fabrication
Publication number
20010021538
Publication date
Sep 13, 2001
Robert Aigner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Configuration with a plurality of sensor groups and method of deter...
Publication number
20010013773
Publication date
Aug 16, 2001
Robert Aigner
G01 - MEASURING TESTING