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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
11,378,893
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,838,310
Issue date
Nov 17, 2020
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,345,712
Issue date
Jul 9, 2019
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,254,663
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,952,515
Issue date
Apr 24, 2018
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method having heat...
Patent number
9,268,236
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,268,242
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,188,880
Issue date
Nov 17, 2015
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,134,622
Issue date
Sep 15, 2015
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,134,623
Issue date
Sep 15, 2015
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,634,056
Issue date
Jan 21, 2014
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,547,519
Issue date
Oct 1, 2013
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,427,629
Issue date
Apr 23, 2013
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid filled lens element, lithographic apparatus comprising such...
Patent number
8,237,912
Issue date
Aug 7, 2012
ASML Netherlands B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid filled lens element, lithographic apparatus comprising such...
Patent number
7,969,549
Issue date
Jun 28, 2011
ASML Netherlands B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and mask havin...
Patent number
7,843,552
Issue date
Nov 30, 2010
ASML Netherlands B.V.
Richard Joseph Bruls
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,808,614
Issue date
Oct 5, 2010
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method having liqui...
Patent number
7,804,575
Issue date
Sep 28, 2010
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,751,027
Issue date
Jul 6, 2010
ASML Netherlands B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,528,929
Issue date
May 5, 2009
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,522,261
Issue date
Apr 21, 2009
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for bonding a pellicle to a patterning device and patterning...
Patent number
7,136,152
Issue date
Nov 14, 2006
ASML Netherlands B.V.
Richard Joseph Bruls
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20210063898
Publication date
Mar 4, 2021
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190324374
Publication date
Oct 24, 2019
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20190235397
Publication date
Aug 1, 2019
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180203364
Publication date
Jul 19, 2018
ASMLNETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20160048085
Publication date
Feb 18, 2016
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160004171
Publication date
Jan 7, 2016
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140233004
Publication date
Aug 21, 2014
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140098357
Publication date
Apr 10, 2014
ASML Netherland B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120113402
Publication date
May 10, 2012
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110273677
Publication date
Nov 10, 2011
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LIQUID FILLED LENS ELEMENT, LITHOGRAPHIC APPARATUS COMPRISING SUCH...
Publication number
20110194096
Publication date
Aug 11, 2011
ASML NETHERLANDS B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100321651
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
Carlo Cornelis Maria LUIJTEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100321650
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
THEODORUS PETRUS MARIA CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100245791
Publication date
Sep 30, 2010
Johannes Henricus Wilhelmus JACOBS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090207397
Publication date
Aug 20, 2009
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090153823
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Carlo Cornelis Maria LUIJTEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing methods, mask and meth...
Publication number
20080137049
Publication date
Jun 12, 2008
ASML NETHERLANDS B.V.
Johannes Christiaan Maria Jasper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Liquid filled lens element, lithographic apparatus comprising such...
Publication number
20080002168
Publication date
Jan 3, 2008
ASML NETHERLANDS B.V.
Herman Boom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070070315
Publication date
Mar 29, 2007
ASML NETHERLANDS B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for bonding a pellicle to a patterning device and patterning...
Publication number
20060109448
Publication date
May 25, 2006
ASML NETHERLANDS B.V.
Richard Joseph Bruls
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060066826
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060033898
Publication date
Feb 16, 2006
ASML NETHERLANDS B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and mask havin...
Publication number
20050280789
Publication date
Dec 22, 2005
ASML NETHERLANDS B.V.
Richard Joseph Bruls
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050175776
Publication date
Aug 11, 2005
ASML NETHERLANDS B.V.
Bod Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing methods, mask and meth...
Publication number
20050140949
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Johannes Christiaan Maria Jasper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY