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Herman Soemers
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Mierlo, NL
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Patents Grants
last 30 patents
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Patent Grant
High positioning reproducible low torque mirror-actuator interface
Patent number
8,256,912
Issue date
Sep 4, 2012
Carl Zeiss SMT GmbH
Herman M. J. R. Soemers
G02 - OPTICS
Information
Patent Grant
Housing structure
Patent number
8,018,664
Issue date
Sep 13, 2011
Carl Zeiss SMT GmbH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Grant
High positioning reproducible low torque mirror-actuator interface
Patent number
7,699,480
Issue date
Apr 20, 2010
Carl Zeiss SMT AG
Herman Soemers
G02 - OPTICS
Information
Patent Grant
High positioning reproducible low torque mirror-actuator interface
Patent number
7,604,359
Issue date
Oct 20, 2009
Carl Zeiss SMT AG
Herman Soemers
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
HOUSING STRUCTURE
Publication number
20110216428
Publication date
Sep 8, 2011
Carl Zeiss SMT GMBH
Stefan Xalter
G02 - OPTICS
Information
Patent Application
HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE
Publication number
20110176234
Publication date
Jul 21, 2011
Carl Zeiss SMT GMBH
Herman Soemers
G02 - OPTICS
Information
Patent Application
HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE
Publication number
20100149671
Publication date
Jun 17, 2010
Carl Zeiss SMT AG
Herman M.J.R. Soemers
G02 - OPTICS
Information
Patent Application
HOUSING STRUCTURE
Publication number
20090303626
Publication date
Dec 10, 2009
Carl Zeiss SMT AG
Stefan Xalter
G02 - OPTICS
Information
Patent Application
SUPPORT FOR AN OPTICAL ELEMENT
Publication number
20090185148
Publication date
Jul 23, 2009
Carl Zeiss SMT AG
Yim-Bun Patrick Kwan
G02 - OPTICS
Information
Patent Application
HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE
Publication number
20090103199
Publication date
Apr 23, 2009
Herman Soemers
G02 - OPTICS
Information
Patent Application
High positioning reproducible low torque mirror - actuator interface
Publication number
20050248860
Publication date
Nov 10, 2005
Herman Soemers
G02 - OPTICS