Herman Vogel

Person

Sandy Hook, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,705,439
- Issue date Jul 7, 2020
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,599,054
- Issue date Mar 24, 2020
- ASML Holding N.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle cooling by non-uniform gas flow
- Patent number 10,423,081
- Issue date Sep 24, 2019
- ASML Holding N.V.
- Thomas Venturino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,746,788
- Issue date Aug 29, 2017
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 9,715,178
- Issue date Jul 25, 2017
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 9,709,899
- Issue date Jul 18, 2017
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,507,278
- Issue date Nov 29, 2016
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,488,923
- Issue date Nov 8, 2016
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,097,992
- Issue date Aug 4, 2015
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,081,311
- Issue date Jul 14, 2015
- ASML Netherlands B.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 8,817,230
- Issue date Aug 26, 2014
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,755,028
- Issue date Jun 17, 2014
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 8,730,450
- Issue date May 20, 2014
- ASML Holdings N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 8,670,105
- Issue date Mar 11, 2014
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,446,563
- Issue date May 21, 2013
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly comprising a conditioning system and at least one object,...
- Patent number 8,441,610
- Issue date May 14, 2013
- ASML Netherlands B.V.
- Ronald Van Der Ham
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and systems for compact, micro-channel, laminar heat exchanging
- Patent number 8,210,248
- Issue date Jul 3, 2012
- ASML Holding N.V.
- Herman Vogel
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,031,325
- Issue date Oct 4, 2011
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 8,004,649
- Issue date Aug 23, 2011
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly comprising a conditioning system and at least one object,...
- Patent number 7,924,399
- Issue date Apr 12, 2011
- ASML Netherlands B.V.
- Ronald Van Der Ham
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,701,550
- Issue date Apr 20, 2010
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for active purging of pellicle volumes
- Patent number 7,619,718
- Issue date Nov 17, 2009
- ASML Holding N.V.
- Florence Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,602,470
- Issue date Oct 13, 2009
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Increasing gas gauge pressure sensitivity using nozzle-face surface...
- Patent number 7,578,168
- Issue date Aug 25, 2009
- ASML Holding N.V.
- Herman Vogel
- G01 - MEASURING TESTING
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 7,411,650
- Issue date Aug 12, 2008
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laminar flow gas curtains for lithographic applications
- Patent number 7,375,791
- Issue date May 20, 2008
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for compact, micro-channel laminar heat exchanging
- Patent number 7,234,514
- Issue date Jun 26, 2007
- ASML Holding N.V.
- Herman Vogel
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Immersion lithography proximity sensor having a nozzle shroud with...
- Patent number 7,140,233
- Issue date Nov 28, 2006
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Proximity sensor nozzle shroud with flow curtain
- Patent number 7,017,390
- Issue date Mar 28, 2006
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion photolithography system and method using microchannel noz...
- Patent number 6,867,844
- Issue date Mar 15, 2005
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190294058
- Publication date Sep 26, 2019
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180188661
- Publication date Jul 5, 2018
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle Cooling by Non-Uniform Gas Flow
- Publication number 20170363973
- Publication date Dec 21, 2017
- ASML Holding N.V.
- Thomas VENTURINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170357165
- Publication date Dec 14, 2017
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...
- Publication number 20170293231
- Publication date Oct 12, 2017
- ASML Holding N.V.
- Herman Vogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170045831
- Publication date Feb 16, 2017
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170031250
- Publication date Feb 2, 2017
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150323876
- Publication date Nov 12, 2015
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...
- Publication number 20140333910
- Publication date Nov 13, 2014
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140300883
- Publication date Oct 9, 2014
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...
- Publication number 20140233003
- Publication date Aug 21, 2014
- ASML Holding N.V.
- Herman VOGEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120249983
- Publication date Oct 4, 2012
- ASML NETHERLANDS B.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...
- Publication number 20120140200
- Publication date Jun 7, 2012
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110310367
- Publication date Dec 22, 2011
- ASML Holding N.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...
- Publication number 20110273676
- Publication date Nov 10, 2011
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110273675
- Publication date Nov 10, 2011
- ASML Holding N.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...
- Publication number 20110273680
- Publication date Nov 10, 2011
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Assembly Comprising a Conditioning System and at Least One Object,...
- Publication number 20110188049
- Publication date Aug 4, 2011
- ASML NETHERLANDS B.V.
- Ronald VAN DER HAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100149514
- Publication date Jun 17, 2010
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090303455
- Publication date Dec 10, 2009
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laminar Flow Gas Curtains for Lithographic Applications
- Publication number 20090073397
- Publication date Mar 19, 2009
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Increasing Gas Gauge Pressure Sensitivity Using Nozzle-Face Surface...
- Publication number 20090000353
- Publication date Jan 1, 2009
- ASML Holding N.V.
- Herman Vogel
- G01 - MEASURING TESTING
Information Patent Application
Immersion Photolithography System and Method Using Microchannel Noz...
- Publication number 20080180645
- Publication date Jul 31, 2008
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and systems for compact, micro-channel, laminar heat exchanging
- Publication number 20080035319
- Publication date Feb 14, 2008
- ASML Holding N.V.
- Herman Vogel
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Assembly comprising a conditioning system and at least one object,...
- Publication number 20070222906
- Publication date Sep 27, 2007
- ASML NETHERLANDS B.V.
- Ronald Van Der Ham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laminar flow gas curtains for lithographic applications
- Publication number 20070002292
- Publication date Jan 4, 2007
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography proximity sensor having a nozzle shroud with...
- Publication number 20060123889
- Publication date Jun 15, 2006
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and systems for compact, micro-channel laminar heat exchanging
- Publication number 20060021744
- Publication date Feb 2, 2006
- ASML Holding N.V.
- Herman Vogel
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Immersion photolithography system and method using microchannel noz...
- Publication number 20050168713
- Publication date Aug 4, 2005
- ASML Holding N.V.
- Herman Vogel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for active purging of pellice volumes
- Publication number 20050074352
- Publication date Apr 7, 2005
- ASML Holding N.V.
- Ci Florence Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Herman Vogel

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Reticle cooling by non-uniform gas flow

Lithographic apparatus and device manufacturing method

Immersion photolithography system and method using microchannel noz...

Immersion photolithography system and method using microchannel noz...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Immersion photolithography system and method using microchannel noz...

Lithographic apparatus and device manufacturing method

Immersion photolithography system and method using microchannel noz...

Immersion photolithography system and method using microchannel noz...

Lithographic apparatus and device manufacturing method

Assembly comprising a conditioning system and at least one object,...

Method and systems for compact, micro-channel, laminar heat exchanging

Lithographic apparatus and device manufacturing method

Immersion photolithography system and method using microchannel noz...

Assembly comprising a conditioning system and at least one object,...

Lithographic apparatus and device manufacturing method

Method and system for active purging of pellicle volumes

Lithographic apparatus and device manufacturing method

Increasing gas gauge pressure sensitivity using nozzle-face surface...

Immersion photolithography system and method using microchannel noz...

Laminar flow gas curtains for lithographic applications

Methods and systems for compact, micro-channel laminar heat exchanging

Immersion lithography proximity sensor having a nozzle shroud with...

Proximity sensor nozzle shroud with flow curtain

Immersion photolithography system and method using microchannel noz...

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Reticle Cooling by Non-Uniform Gas Flow

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZ...

Assembly Comprising a Conditioning System and at Least One Object,...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Laminar Flow Gas Curtains for Lithographic Applications

Increasing Gas Gauge Pressure Sensitivity Using Nozzle-Face Surface...

Immersion Photolithography System and Method Using Microchannel Noz...

Method and systems for compact, micro-channel, laminar heat exchanging

Assembly comprising a conditioning system and at least one object,...

Laminar flow gas curtains for lithographic applications

Immersion lithography proximity sensor having a nozzle shroud with...

Methods and systems for compact, micro-channel laminar heat exchanging

Immersion photolithography system and method using microchannel noz...

Method and system for active purging of pellice volumes