Hermann Bieg

Person

Huettlingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Mirror arrangement for microlithographic projection exposure appara...
- Patent number 10,663,873
- Issue date May 26, 2020
- Carl Zeiss SMT GmbH
- Willi Heintel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for semiconductor lithography with re...
- Patent number 10,606,179
- Issue date Mar 31, 2020
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diaphragm changing device
- Patent number 10,139,733
- Issue date Nov 27, 2018
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical aperture device
- Patent number 9,341,955
- Issue date May 17, 2016
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical aperture device
- Patent number 8,687,169
- Issue date Apr 1, 2014
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical assembly
- Patent number 8,570,676
- Issue date Oct 29, 2013
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Diaphragm changing device
- Patent number 8,089,707
- Issue date Jan 3, 2012
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Optical imaging device having at least one system diaphragm
- Patent number 8,009,343
- Issue date Aug 30, 2011
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G02 - OPTICS
Information Patent Grant
Optical assembly
- Patent number 7,929,227
- Issue date Apr 19, 2011
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Optical assembly
- Patent number 7,791,826
- Issue date Sep 7, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Optical system for radiation in the EUV-wavelength range and method...
- Patent number 7,763,870
- Issue date Jul 27, 2010
- Carl Zeiss SMT AG
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diaphragm changing device
- Patent number 7,684,125
- Issue date Mar 23, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH RE...
- Publication number 20190219935
- Publication date Jul 18, 2019
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR ARRANGEMENT FOR MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARA...
- Publication number 20170108788
- Publication date Apr 20, 2017
- Carl Zeiss SMT GMBH
- Willi Heintel
- G02 - OPTICS
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20160282724
- Publication date Sep 29, 2016
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
OPTICAL APERTURE DEVICE
- Publication number 20140160456
- Publication date Jun 12, 2014
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20120075611
- Publication date Mar 29, 2012
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
OPTICAL ASSEMBLY
- Publication number 20110181857
- Publication date Jul 28, 2011
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
OPTICAL APERTURE DEVICE
- Publication number 20110063595
- Publication date Mar 17, 2011
- Carl Zeiss SMT AG
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY
- Publication number 20100271607
- Publication date Oct 28, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20100134777
- Publication date Jun 3, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE WITH EXCHANGEABLE DIAPHRAGMS AND METHOD THEREFOR
- Publication number 20100066990
- Publication date Mar 18, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Imaging Device Having At Least One System Diaphragm
- Publication number 20090021820
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Bernhard Gellrich
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR RADIATION IN THE EUV-WAVELENGTH RANGE AND METHOD...
- Publication number 20080315134
- Publication date Dec 25, 2008
- Carl Zeiss SMT AG
- Dirk Heinrich EHM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Assembly
- Publication number 20080170303
- Publication date Jul 17, 2008
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
Diaphragm changing device
- Publication number 20070053076
- Publication date Mar 8, 2007
- Hermann Bieg
- G02 - OPTICS

Hermann Bieg

Person

Patents Grantslast 30 patents

Mirror arrangement for microlithographic projection exposure appara...

Projection exposure apparatus for semiconductor lithography with re...

Diaphragm changing device

Optical aperture device

Optical aperture device

Optical assembly

Diaphragm changing device

Optical imaging device having at least one system diaphragm

Optical assembly

Optical assembly

Optical system for radiation in the EUV-wavelength range and method...

Diaphragm changing device

Patents Applicationslast 30 patents

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH RE...

MIRROR ARRANGEMENT FOR MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARA...

DIAPHRAGM CHANGING DEVICE

OPTICAL APERTURE DEVICE

DIAPHRAGM CHANGING DEVICE

OPTICAL ASSEMBLY

OPTICAL APERTURE DEVICE

OPTICAL ASSEMBLY

DIAPHRAGM CHANGING DEVICE

IMAGING DEVICE WITH EXCHANGEABLE DIAPHRAGMS AND METHOD THEREFOR

Optical Imaging Device Having At Least One System Diaphragm

OPTICAL SYSTEM FOR RADIATION IN THE EUV-WAVELENGTH RANGE AND METHOD...

Optical Assembly

Diaphragm changing device