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Hermann Sigmund
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Germering, DE
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last 30 patents
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Patent Grant
Method for producing a silicate layer in an integrated circuit
Patent number
5,262,358
Issue date
Nov 16, 1993
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Hermann Sigmund
H01 - BASIC ELECTRIC ELEMENTS