Hermanus Adrianus DILLEN

Person

Maarheeze, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method of wafer alignment using at resolution metrology on product...
- Patent number 12,124,179
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for calibrating a scanning charged particle microscope
- Patent number 11,972,922
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Hermanus Adrianus Dillen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for characterizing a manufacturing process of semiconductor...
- Patent number 11,860,548
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for controlling a manufacturing process and associated appar...
- Patent number 11,796,920
- Issue date Oct 24, 2023
- ASML Netherlands B.V.
- Jochem Sebastiaan Wildenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of metrology and associated apparatuses
- Patent number 11,733,614
- Issue date Aug 22, 2023
- ASML Netherlands B.V.
- Thomas Jarik Huisman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection tool and inspection method
- Patent number 11,668,661
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Thomas Jarik Huisman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for calibrating a scanning charged particle microscope
- Patent number 11,646,174
- Issue date May 9, 2023
- ASML Netherlands, B.V.
- Hermanus Adrianus Dillen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of metrology and associated apparatuses
- Patent number 11,112,703
- Issue date Sep 7, 2021
- ASML Netherlands B.V.
- Thomas Jarik Huisman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for pattern correction and verification
- Patent number 10,754,256
- Issue date Aug 25, 2020
- ASML Netherlands B.V.
- Thomas I. Wallow
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
A METHOD OF MONITORING A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARA...
- Publication number 20240346200
- Publication date Oct 17, 2024
- ASML NETHERLANDS B.V.
- Vahid BASTANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR INSPECTION BY FAILURE MECHANISM CLASSIFICATIO...
- Publication number 20240319123
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Achim WOESSNER
- G01 - MEASURING TESTING
Information Patent Application
ALIGNING A DISTORTED IMAGE
- Publication number 20240297013
- Publication date Sep 5, 2024
- ASML NETHERLANDS B.V.
- Jasper Frans Mathijs VAN RENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD FOR CHARACTERIZING A MANUFACTURING PROCESS OF SEMICONDUCTO...
- Publication number 20240111218
- Publication date Apr 4, 2024
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF
- Publication number 20240021404
- Publication date Jan 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD OF MONITORING A LITHOGRAPHIC PROCESS
- Publication number 20240004309
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Hendrik Adriaan VAN LAARHOVEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS
- Publication number 20230333485
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE
- Publication number 20230245851
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Hermanus Adrianus DILLEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF WAFER ALIGNMENT USING AT RESOLUTION METROLOGY ON PRODUCT...
- Publication number 20230168594
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...
- Publication number 20230082858
- Publication date Mar 16, 2023
- ASML NETHERLANDS B.V.
- Jochem Sebastiaan WILDENBERG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PRO...
- Publication number 20230076218
- Publication date Mar 9, 2023
- ASML NETHERLANDS B.V.
- Koenraad VAN INGEN SCHENAU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A FIELD-OF-VIEW SETTING
- Publication number 20230023153
- Publication date Jan 26, 2023
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF METROLOGY AND ASSOCIATED APPARATUSES
- Publication number 20220107571
- Publication date Apr 7, 2022
- ASML NETHERLANDS B.V.
- Thomas Jarik Huisman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
A METHOD FOR CHARACTERIZING A MANUFACTURING PROCESS OF SEMICONDUCTO...
- Publication number 20220100098
- Publication date Mar 31, 2022
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE
- Publication number 20220050391
- Publication date Feb 17, 2022
- ASML NETHERLANDS B.V.
- Hermanus Adrianus DILLEN
- G01 - MEASURING TESTING
Information Patent Application
METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY C...
- Publication number 20210407112
- Publication date Dec 30, 2021
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION TOOL AND INSPECTION METHOD
- Publication number 20210003521
- Publication date Jan 7, 2021
- ASML NETHERLANDS B.V.
- Thomas Jarik HUISMAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE
- Publication number 20200211819
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Hermanus Adrianus DILLEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF METROLOGY AND ASSOCIATED APPARATUSES
- Publication number 20190294055
- Publication date Sep 26, 2019
- ASML Netherlands B.V.
- Thomas Jarik Huisman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PATTERN CORRECTION AND VERIFICATION
- Publication number 20180275521
- Publication date Sep 27, 2018
- ASML NETHERLANDS B.V.
- Thomas I. WALLOW
- G06 - COMPUTING CALCULATING COUNTING

Hermanus Adrianus DILLEN

Person

Patents Grantslast 30 patents

Method of wafer alignment using at resolution metrology on product...

Method for calibrating a scanning charged particle microscope

Method for characterizing a manufacturing process of semiconductor...

Method for controlling a manufacturing process and associated appar...

Method of metrology and associated apparatuses

Inspection tool and inspection method

Method for calibrating a scanning charged particle microscope

Method of metrology and associated apparatuses

Method and apparatus for pattern correction and verification

Patents Applicationslast 30 patents

A METHOD OF MONITORING A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARA...

SYSTEM AND METHOD FOR INSPECTION BY FAILURE MECHANISM CLASSIFICATIO...

ALIGNING A DISTORTED IMAGE

A METHOD FOR CHARACTERIZING A MANUFACTURING PROCESS OF SEMICONDUCTO...

CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF

A METHOD OF MONITORING A LITHOGRAPHIC PROCESS

TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS

METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE

METHOD OF WAFER ALIGNMENT USING AT RESOLUTION METROLOGY ON PRODUCT...

METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...

METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PRO...

METHOD FOR DETERMINING A FIELD-OF-VIEW SETTING

METHOD OF METROLOGY AND ASSOCIATED APPARATUSES

A METHOD FOR CHARACTERIZING A MANUFACTURING PROCESS OF SEMICONDUCTO...

METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE

METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY C...

INSPECTION TOOL AND INSPECTION METHOD

METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE

METHOD OF METROLOGY AND ASSOCIATED APPARATUSES

METHOD AND APPARATUS FOR PATTERN CORRECTION AND VERIFICATION