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Hermanus Mathias Joannes Rene Soemers
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Mierlo, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and pivotable structure assembly
Patent number
7,884,920
Issue date
Feb 8, 2011
ASML Netherlands B.V.
Hermanus Mathias Joannes Rene Soemers
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,397,040
Issue date
Jul 8, 2008
ASML Netherlands B.V.
Johannes Cornelis Driessen
G01 - MEASURING TESTING
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Patent Grant
Lithographic apparatus, device manufacturing method and device manu...
Patent number
7,084,953
Issue date
Aug 1, 2006
ASML Netherlands B.V.
Johannes Cornelis Driessen
G01 - MEASURING TESTING