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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,237,490
Issue date
Feb 1, 2022
ASML Netherlands B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement system, lithographic apparatus and device manufacturing...
Patent number
11,009,800
Issue date
May 18, 2021
ASML Netherlands B.V.
Han-Kwang Nienhuys
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining defects in a substrate and apparatus for expo...
Patent number
8,345,231
Issue date
Jan 1, 2013
ASML Netherlands B.V.
Nilay Saha
G01 - MEASURING TESTING
Information
Patent Grant
Method of calibrating a lithographic apparatus and device manufactu...
Patent number
7,426,011
Issue date
Sep 16, 2008
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
7,423,725
Issue date
Sep 9, 2008
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT SYSTEM AND METHOD FOR CHARACTERIZING A PATTERNING DEVICE
Publication number
20220373894
Publication date
Nov 24, 2022
ASML NETHERLANDS B.V.
Andre Bernardus JEUNINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
Publication number
20200379360
Publication date
Dec 3, 2020
ASML NETHERLANDS B.V.
Han-Kwang Nienhuys
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190079420
Publication date
Mar 14, 2019
ASML NETHERLANDS B.V.
Bearrach MOEST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING DEFECTS IN A SUBSTRATE AND APPARATUS FOR EXPO...
Publication number
20090296090
Publication date
Dec 3, 2009
ASML NETHERLANDS B.V.
Nilay SAHA
G01 - MEASURING TESTING
Information
Patent Application
Method of calibrating a lithographic apparatus and device manufactu...
Publication number
20070058152
Publication date
Mar 15, 2007
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic method
Publication number
20070052940
Publication date
Mar 8, 2007
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY