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Herng Liu
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Tigard, OR, US
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last 30 patents
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Patent Application
Substrate carrier for surface planarization
Publication number
20060000806
Publication date
Jan 5, 2006
Reza M. Golzarian
B24 - GRINDING POLISHING
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Patent Application
Pivotable slurry arm
Publication number
20050164603
Publication date
Jul 28, 2005
Colby J. House
B24 - GRINDING POLISHING