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Patents Grants
last 30 patents
Information
Patent Grant
Multilayer extreme ultraviolet reflectors
Patent number
11,782,337
Issue date
Oct 10, 2023
Applied Materials, Inc.
Wen Xiao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multilayer extreme ultraviolet reflectors
Patent number
11,762,278
Issue date
Sep 19, 2023
Applied Materials, Inc.
Vibhu Jindal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to anneal EUV mask blank
Patent number
11,480,866
Issue date
Oct 25, 2022
Applied Materials, Inc.
Herng Yau Yoong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method of measuring refractive index of EUV mask absorber
Patent number
11,467,499
Issue date
Oct 11, 2022
Applied Materials, Inc.
Wen Xiao
G01 - MEASURING TESTING
Information
Patent Grant
System and method to measure refractive index at specific wavelengths
Patent number
11,366,059
Issue date
Jun 21, 2022
Applied Materials Inc.
Wen Xiao
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
MULTILAYER EXTREME ULTRAVIOLET REFLECTORS
Publication number
20230075471
Publication date
Mar 9, 2023
Applied Materials, Inc.
Wen Xiao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTILAYER EXTREME ULTRAVIOLET REFLECTORS
Publication number
20220404692
Publication date
Dec 22, 2022
Applied Materials, Inc.
Vibhu Jindal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO ANNEAL EUV MASK BLANK
Publication number
20220187697
Publication date
Jun 16, 2022
Applied Materials, Inc.
Herng Yau Yoong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method of Measuring Refractive Index of EUV Mask Absorber
Publication number
20210382398
Publication date
Dec 9, 2021
Applied Materials, Inc.
Wen Xiao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method to Measure Refractive Index at Specific Wavelengths
Publication number
20210381967
Publication date
Dec 9, 2021
Applied Materials, Inc.
Wen Xiao
G01 - MEASURING TESTING
Information
Patent Application
EXTREME ULTRAVIOLET MASK BLANK DEFECT REDUCTION METHODS
Publication number
20210124253
Publication date
Apr 29, 2021
Applied Materials, Inc.
Herng Yau Yoong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY