Heung Hyun Shin

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Seoul, KR

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Patents Grantslast 30 patents

Information Patent Grant
Interferometer for TSV measurement and measurement method using same
- Patent number 8,873,067
- Issue date Oct 28, 2014
- SNU Precision Co., Ltd.
- Ki Hun Lee
- G01 - MEASURING TESTING
Information Patent Grant
Plasma monitoring device and method
- Patent number 8,416,293
- Issue date Apr 9, 2013
- SNU Precision Co. Ltd.
- Heung Hyun Shin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Interferometer for TSV Measurement and Measurement Method Using Same
- Publication number 20140036273
- Publication date Feb 6, 2014
- SNU PRECISION CO. LTD.
- Ki Hun Lee
- G01 - MEASURING TESTING
Information Patent Application
PLASMA MONITORING DEVICE AND METHOD
- Publication number 20100149326
- Publication date Jun 17, 2010
- SNU PRECISION CO. LTD.
- Heung Hyun Shin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DETECTING MATERIALS ON WAFER AND REPAIR SYSTEM AND METHOD THEREOF
- Publication number 20100029019
- Publication date Feb 4, 2010
- SNU PRECISION CO. LTD.
- Heui Jae PARK
- G01 - MEASURING TESTING