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Heung Lak Park
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Wilsonville, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Electroless layer plating process and apparatus
Patent number
7,897,198
Issue date
Mar 1, 2011
Novellus Systems, Inc.
Heung L. Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabrication of semiconductor interconnect structure
Patent number
7,531,463
Issue date
May 12, 2009
Novellus Systems, Inc.
Daniel A. Koos
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for fabrication of semiconductor interconnect structure with...
Patent number
7,338,908
Issue date
Mar 4, 2008
Novellus Systems, Inc.
Daniel A. Koos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nitridation of electrolessly deposited cobalt
Patent number
6,962,873
Issue date
Nov 8, 2005
Novellus Systems, Inc.
Heung L. Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Fabrication of semiconductor interconnect structure
Publication number
20070105377
Publication date
May 10, 2007
Novellus Systems, Inc.
Daniel A. Koos
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Liquid treatment using thin liquid layer
Publication number
20040065540
Publication date
Apr 8, 2004
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR