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Heungsoo Park
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McKinney, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Chemical treatment of low-k dielectric films
Patent number
6,838,300
Issue date
Jan 4, 2005
Texas Instruments Incorporated
Changming Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for polymer removal following etch-stop layer etch
Patent number
6,713,402
Issue date
Mar 30, 2004
Texas Instruments Incorporated
Patricia Beauregard Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to determine a complete etch in integrated devices
Patent number
6,645,781
Issue date
Nov 11, 2003
Texas Instruments Incorporated
Ping Jiang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method for removing residue containing an embedded metal
Publication number
20070184666
Publication date
Aug 9, 2007
Texas Instruments Inc.
Patricia Beauregard Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Post-etch clean process for porous low dielectric constant materials
Publication number
20050045206
Publication date
Mar 3, 2005
Patricia Beauregard Smith
B08 - CLEANING
Information
Patent Application
Hexamethyldisilazane treatment of low-k dielectric films
Publication number
20040152296
Publication date
Aug 5, 2004
TEXAS INSTRUMENTS INCORPORATED
Phillip D. Matz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemical treatment of low-k dielectric films
Publication number
20040150012
Publication date
Aug 5, 2004
TEXAS INSTRUMENTS INCORPORATED
Changming Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for polymer removal following etch-stop layer etch
Publication number
20030224595
Publication date
Dec 4, 2003
Patricia Beauregard Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO DETERMINE A COMPLETE ETCH IN INTEGRATED DEVICES
Publication number
20030203516
Publication date
Oct 30, 2003
Ping Jiang
H01 - BASIC ELECTRIC ELEMENTS