Heyin Li

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Measurement library optimization in semiconductor metrology
- Patent number 10,732,520
- Issue date Aug 4, 2020
- KLA-Tencor Corporation
- Meng Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated metrology system selection
- Patent number 10,502,692
- Issue date Dec 10, 2019
- KLA-Tencor Corporation
- Meng Cao
- G01 - MEASURING TESTING
Information Patent Grant
Measurement library optimization in semiconductor metrology
- Patent number 10,345,721
- Issue date Jul 9, 2019
- KLA-Tencor Corporation
- Meng Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Automated Metrology System Selection
- Publication number 20170023491
- Publication date Jan 26, 2017
- KLA-Tencor Corporation
- Meng Cao
- G01 - MEASURING TESTING