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Hiaashi Okuchi
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Yokohama-shi, JP
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last 30 patents
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Patent Grant
Method and device for cleaning semiconductor substrate
Patent number
8,961,696
Issue date
Feb 24, 2015
Kabushiki Kaisha Toshiba
Hiroshi Tomita
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD AND DEVICE FOR CLEANING SEMICONDUCTOR SUBSTRATE
Publication number
20130068257
Publication date
Mar 21, 2013
Hiroshi TOMITA
H01 - BASIC ELECTRIC ELEMENTS