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Hichem M'SAAD
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Tunis, TN
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last 30 patents
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Patent Grant
Method and system for supplying a cleaning gas into a process chamber
Patent number
9,206,511
Issue date
Dec 8, 2015
Applied Materials, Inc.
Ramprakash Sankarakrishnan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER
Publication number
20140076236
Publication date
Mar 20, 2014
Applied Materials, Inc.
Ramprakash SANKARAKRISHNAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...