HIDEAKI AMANO

Person

ZAMA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electrode, susceptor, plasma processing apparatus and method of mak...
- Patent number 7,337,745
- Issue date Mar 4, 2008
- Tokyo Electron Limited
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and electrode structure and table stru...
- Patent number 7,033,444
- Issue date Apr 25, 2006
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 6,767,429
- Issue date Jul 27, 2004
- Tokyo Electron Limited
- Hideaki Amano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for plasma processing
- Patent number 6,730,369
- Issue date May 4, 2004
- Tokyo Electron Limited
- Hideaki Amano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vacuum processing method and apparatus
- Patent number 6,401,359
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Hideaki Amano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method
- Patent number 6,392,350
- Issue date May 21, 2002
- Tokyo Electron Limited
- Hideaki Amano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment system and method
- Patent number 6,333,269
- Issue date Dec 25, 2001
- Tokyo Electron Limited
- Yoko Naito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and system
- Patent number 6,066,568
- Issue date May 23, 2000
- Tokyo Electron Limited
- Yoshinobu Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma deposition method and an apparatus therefor
- Patent number 5,948,485
- Issue date Sep 7, 1999
- Tokyo Electron Limited
- Hideaki Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron plasma processing system
- Patent number 5,554,249
- Issue date Sep 10, 1996
- Tokyo Electron Limited
- Makoto Hasegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA TREATMENT SYSTEM AND METHOD
- Publication number 20010008798
- Publication date Jul 19, 2001
- YOKO NAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

HIDEAKI AMANO

Person

Patents Grantslast 30 patents

Electrode, susceptor, plasma processing apparatus and method of mak...

Plasma processing apparatus, and electrode structure and table stru...

Vacuum processing apparatus

Device and method for plasma processing

Vacuum processing method and apparatus

Plasma processing method

Plasma treatment system and method

Plasma treatment method and system

Plasma deposition method and an apparatus therefor

Magnetron plasma processing system

Patents Applicationslast 30 patents

PLASMA TREATMENT SYSTEM AND METHOD