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High purity titanium sputtering targets
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Patent number 5,772,860
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Issue date Jun 30, 1998
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Japan Energy Corporation
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Susumu Sawada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Mosaic target
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Patent number 5,466,355
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Issue date Nov 14, 1995
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Japan Energy Corporation
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Tateo Ohhashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering target
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Patent number 5,415,829
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Issue date May 16, 1995
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Nikko Kyodo Co., Ltd.
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Tateo Ohhashi
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B22 - CASTING POWDER METALLURGY