HIDEAKI HARA

Person

KANAGAWA-KEN, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 10,126,661
- Issue date Nov 13, 2018
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Patent number 10,012,909
- Issue date Jul 3, 2018
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,411,248
- Issue date Aug 9, 2016
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with component from which liquid is protected an...
- Patent number 9,223,224
- Issue date Dec 29, 2015
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,046,790
- Issue date Jun 2, 2015
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Patent number 9,041,901
- Issue date May 26, 2015
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Patent number 8,867,017
- Issue date Oct 21, 2014
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Patent number 8,854,599
- Issue date Oct 7, 2014
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for manufacturing device
- Patent number 8,537,331
- Issue date Sep 17, 2013
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,411,248
- Issue date Apr 2, 2013
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,169,590
- Issue date May 1, 2012
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for manufacturing device
- Patent number 8,111,375
- Issue date Feb 7, 2012
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,111,373
- Issue date Feb 7, 2012
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Patent number 7,847,916
- Issue date Dec 7, 2010
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Patent number 7,826,031
- Issue date Nov 2, 2010
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for manufacturing device
- Patent number 7,480,029
- Issue date Jan 20, 2009
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage control method using a temperature
- Patent number 6,407,799
- Issue date Jun 18, 2002
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus with improved positioning capability
- Patent number 6,172,373
- Issue date Jan 9, 2001
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and exposure apparatus provided with the stage appa...
- Patent number 6,158,298
- Issue date Dec 12, 2000
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and a stage control method
- Patent number 5,959,732
- Issue date Sep 28, 1999
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and exposure apparatus provided with the stage appa...
- Patent number 5,839,324
- Issue date Nov 24, 1998
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20190064678
- Publication date Feb 28, 2019
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...
- Publication number 20180299789
- Publication date Oct 18, 2018
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20160327874
- Publication date Nov 10, 2016
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus with Component from which Liquid is Protected an...
- Publication number 20160103397
- Publication date Apr 14, 2016
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Carrier System, Exposure Apparatus, Carrier Method, Exposure Method...
- Publication number 20160023356
- Publication date Jan 28, 2016
- Nikon Corporation
- Hideaki HARA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...
- Publication number 20150234282
- Publication date Aug 20, 2015
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20150234292
- Publication date Aug 20, 2015
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20130182233
- Publication date Jul 18, 2013
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...
- Publication number 20130135596
- Publication date May 30, 2013
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Publication number 20110013161
- Publication date Jan 20, 2011
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device fabrication method
- Publication number 20090180090
- Publication date Jul 16, 2009
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Publication number 20090128793
- Publication date May 21, 2009
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for manufacturing device
- Publication number 20080291410
- Publication date Nov 27, 2008
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus And Device Fabrication Method
- Publication number 20070263188
- Publication date Nov 15, 2007
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device fabrication method
- Publication number 20070081136
- Publication date Apr 12, 2007
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Publication number 20070076183
- Publication date Apr 5, 2007
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for manufacturing device
- Publication number 20070064209
- Publication date Mar 22, 2007
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device fabricating method
- Publication number 20060139594
- Publication date Jun 29, 2006
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for manufacturing device
- Publication number 20060033901
- Publication date Feb 16, 2006
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for manufacturing device
- Publication number 20060023188
- Publication date Feb 2, 2006
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Publication number 20050243293
- Publication date Nov 3, 2005
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A STAGE CONTROL METHOD USING A TEMPERATURE
- Publication number 20020015139
- Publication date Feb 7, 2002
- HIDEAKI HARA
- G01 - MEASURING TESTING

HIDEAKI HARA

Person

Patents Grantslast 30 patents

Exposure apparatus and device fabrication method

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Exposure apparatus and device fabrication method

Exposure apparatus with component from which liquid is protected an...

Exposure apparatus and device fabrication method

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Exposure apparatus and method for manufacturing device

Exposure apparatus and device fabrication method

Exposure apparatus and device fabrication method

Exposure apparatus and method for manufacturing device

Exposure apparatus and device fabrication method

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Exposure apparatus and method for manufacturing device

Stage control method using a temperature

Stage apparatus with improved positioning capability

Stage apparatus and exposure apparatus provided with the stage appa...

Stage apparatus and a stage control method

Stage apparatus and exposure apparatus provided with the stage appa...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

Exposure Apparatus with Component from which Liquid is Protected an...

Carrier System, Exposure Apparatus, Carrier Method, Exposure Method...

LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Exposure apparatus and device fabrication method

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Exposure apparatus and method for manufacturing device

Exposure Apparatus And Device Fabrication Method

Exposure apparatus and device fabrication method

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Exposure apparatus and method for manufacturing device

Exposure apparatus and device fabricating method

Exposure apparatus and method for manufacturing device

Exposure apparatus and method for manufacturing device

Liquid recovery apparatus, exposure apparatus, exposure method, and...

A STAGE CONTROL METHOD USING A TEMPERATURE