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Kudamatsu, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor processing system and program
Patent number
9,385,016
Issue date
Jul 5, 2016
Hitachi High-Technologies Corporation
Teruo Nakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
9,343,340
Issue date
May 17, 2016
Hitachi High-Technologies Corporation
Keita Nogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
Patent number
9,011,065
Issue date
Apr 21, 2015
Hitachi High-Technologies Corporation
Susumu Tauchi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Vacuum processing apparatus and program
Patent number
8,849,446
Issue date
Sep 30, 2014
Hitachi High-Technologies Corporation
Teruo Nakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,747,046
Issue date
Jun 10, 2014
Hitachi High-Technologies Corporation
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and program
Patent number
8,538,573
Issue date
Sep 17, 2013
Hitachi High-Technologies Corporation
Teruo Nakata
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma treatment apparatus and plasma treatment method
Patent number
8,148,268
Issue date
Apr 3, 2012
Hitachi High-Technologies Corporation
Kohei Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and its diagnosis apparatus a...
Patent number
7,047,093
Issue date
May 16, 2006
Hitachi High-Technologies Corporation
Shigeru Nakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and its diagnosis apparatus a...
Patent number
6,901,306
Issue date
May 31, 2005
Hitachi High-Technologies Corporation
Shigeru Nakamoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
Publication number
20150194327
Publication date
Jul 9, 2015
Hitachi High-Technologies Corporation
Susumu TAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND METHOD OF OPERATING THE SAME
Publication number
20140044502
Publication date
Feb 13, 2014
Takashi UEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20130183121
Publication date
Jul 18, 2013
Hitachi High-Technologies Corporation
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20120163943
Publication date
Jun 28, 2012
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processor
Publication number
20120027542
Publication date
Feb 2, 2012
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20110318143
Publication date
Dec 29, 2011
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20110229289
Publication date
Sep 22, 2011
Keita Nogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND PROGRAM
Publication number
20110217148
Publication date
Sep 8, 2011
Teruo NAKATA
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
VACUUM PROCESSING APPARATUS AND PROGRAM
Publication number
20110218662
Publication date
Sep 8, 2011
Teruo Nakata
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR PROCESSING SYSTEM AND PROGRAM
Publication number
20110144792
Publication date
Jun 16, 2011
Teruo Nakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
Publication number
20110110752
Publication date
May 12, 2011
Hitachi High-Technologies Corporation
Susumu TAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
Publication number
20110110751
Publication date
May 12, 2011
Susumu TAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
Publication number
20090152242
Publication date
Jun 18, 2009
Kohei Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Remote diagnostic system for facilities and remote diagnostic method
Publication number
20050108577
Publication date
May 19, 2005
Kouji Nishihata
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Semiconductor manufacturing apparatus and its diagnosis apparatus a...
Publication number
20040078946
Publication date
Apr 29, 2004
Shigeru Nakamoto
G05 - CONTROLLING REGULATING
Information
Patent Application
Semiconductor manufacturing apparatus and its diagnosis apparatus a...
Publication number
20030163217
Publication date
Aug 28, 2003
Shigeru Nakamoto
G05 - CONTROLLING REGULATING
Information
Patent Application
Remote diagnostic system for facilities and remote diagnostic method
Publication number
20020013908
Publication date
Jan 31, 2002
Kouji Nishihata
G06 - COMPUTING CALCULATING COUNTING