Hideaki Nagasaki

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
System and method for correcting optical path length measurement er...
- Patent number 11,920,928
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Kenji Nagai
- G01 - MEASURING TESTING
Information Patent Grant
Light interference system and substrate processing apparatus
- Patent number 11,710,614
- Issue date Jul 25, 2023
- Tokyo Electron Limited
- Kenji Nagai
- G02 - OPTICS
Information Patent Grant
Apparatus for processing substrate and method for detecting a prese...
- Patent number 11,264,267
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Takaharu Miyadate
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CORRECTING OPTICAL PATH LENGTH MEASUREMENT ER...
- Publication number 20220357146
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Kenji NAGAI
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD
- Publication number 20220230856
- Publication date Jul 21, 2022
- TOKYO ELECTRON LIMITED
- Ichiro SONE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT INTERFERENCE SYSTEM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210287876
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Kenji Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD FOR DETECTING A PRESE...
- Publication number 20200303235
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Takaharu MIYADATE
- H01 - BASIC ELECTRIC ELEMENTS