Hideaki Sakamoto

Person

Kumagaya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and exposure method
- Patent number 8,064,067
- Issue date Nov 22, 2011
- Nikon Corporation
- Hideaki Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method utilizing pendulum interferometer...
- Patent number 7,466,396
- Issue date Dec 16, 2008
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 7,433,050
- Issue date Oct 7, 2008
- Nikon Corporation
- Hideaki Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,397,534
- Issue date Jul 8, 2008
- Nikon Corporation
- Naohiko Iwata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration-attenuation devices having low lateral stiffness, and exp...
- Patent number 6,987,559
- Issue date Jan 17, 2006
- Nikon Corporation
- Alton H. Phillips
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 6,710,850
- Issue date Mar 23, 2004
- Nikon Corporation
- Atsushi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration isolation apparatus for stage
- Patent number 6,327,024
- Issue date Dec 4, 2001
- Nikon Corporation
- Yutaka Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of isolating vibration in exposure apparatus
- Patent number 5,931,441
- Issue date Aug 3, 1999
- Nikon Corporation
- Hideaki Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Levelling device in an exposure apparatus
- Patent number 4,999,669
- Issue date Mar 12, 1991
- Nikon Corporation
- Hideaki Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Support structure and exposure apparatus
- Publication number 20100171022
- Publication date Jul 8, 2010
- Nikon Corporation
- Norihiko Fujimaki
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Application
Exposure apparatus and exposure method
- Publication number 20090161082
- Publication date Jun 25, 2009
- Nikon Corporation
- Hideaki Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography apparatus and method utilizing pendulum interferometer...
- Publication number 20070139635
- Publication date Jun 21, 2007
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method
- Publication number 20070097367
- Publication date May 3, 2007
- Nikon Corporation
- Hideaki Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060077368
- Publication date Apr 13, 2006
- Nikon Corporation
- Naohiko Iwata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Vibration-attenuation devices having low lateral stiffness, and exp...
- Publication number 20040080729
- Publication date Apr 29, 2004
- NIKON CORPORATION
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method
- Publication number 20020109824
- Publication date Aug 15, 2002
- Nikon Corporation
- Atsushi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hideaki Sakamoto

Person

Patents Grantslast 30 patents

Exposure apparatus and exposure method

Lithography apparatus and method utilizing pendulum interferometer...

Exposure apparatus and exposure method

Exposure apparatus and device manufacturing method

Vibration-attenuation devices having low lateral stiffness, and exp...

Exposure apparatus and exposure method

Vibration isolation apparatus for stage

Method of isolating vibration in exposure apparatus

Levelling device in an exposure apparatus

Patents Applicationslast 30 patents

Support structure and exposure apparatus

Exposure apparatus and exposure method

Lithography apparatus and method utilizing pendulum interferometer...

Exposure apparatus and exposure method

Exposure apparatus and device manufacturing method

Vibration-attenuation devices having low lateral stiffness, and exp...

Exposure apparatus and exposure method