Hideaki SAKURAI

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing template and method of forming pattern
- Patent number 11,931,923
- Issue date Mar 19, 2024
- Kioxia Corporation
- Takeharu Motokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,789,365
- Issue date Oct 17, 2023
- Kioxia Corporation
- Ryu Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for processing substrates of different types
- Patent number 11,682,566
- Issue date Jun 20, 2023
- Kioxia Corporation
- Kosuke Takai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning substrate and cleaning device
- Patent number 11,651,953
- Issue date May 16, 2023
- Kioxia Corporation
- Minako Inukai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and template manufacturing method
- Patent number 11,493,846
- Issue date Nov 8, 2022
- Kioxia Corporation
- Takeharu Motokawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for cleaning substrate and substrate processing apparatus
- Patent number 11,264,233
- Issue date Mar 1, 2022
- Kioxia Corporation
- Kyo Otsubo
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 11,185,895
- Issue date Nov 30, 2021
- TOSHIBA MEMORY CORPORATION
- Mana Tanabe
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 11,123,774
- Issue date Sep 21, 2021
- TOSHIBA MEMORY CORPORATION
- Kosuke Takai
- B08 - CLEANING
Information Patent Grant
Freeze cleaning apparatus
- Patent number 10,882,082
- Issue date Jan 5, 2021
- TOSHIBA MEMORY CORPORATION
- Hideaki Sakurai
- B08 - CLEANING
Information Patent Grant
Method for cleaning substrate and substrate processing apparatus
- Patent number 10,692,715
- Issue date Jun 23, 2020
- TOSHIBA MEMORY CORPORATION
- Kyo Otsubo
- B08 - CLEANING
Information Patent Grant
Substrate production method, substrate processing apparatus, and su...
- Patent number 10,486,203
- Issue date Nov 26, 2019
- TOSHIBA MEMORY CORPORATION
- Hideaki Sakurai
- B08 - CLEANING
Information Patent Grant
Dust collection apparatus and dust collection system
- Patent number 10,464,110
- Issue date Nov 5, 2019
- TOSHIBA MEMORY CORPORATION
- Hideaki Sakurai
- B08 - CLEANING
Information Patent Grant
Pattern formation method, control device, and semiconductor device...
- Patent number 10,241,394
- Issue date Mar 26, 2019
- TOSHIBA MEMORY CORPORATION
- Keiko Morishita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning method, and template for nanoimprint and producing metho...
- Patent number 9,841,674
- Issue date Dec 12, 2017
- TOSHIBA MEMORY CORPORATION
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and mask pattern data
- Patent number 9,244,343
- Issue date Jan 26, 2016
- Kabushiki Kaisha Toshiba
- Ryoji Yoshikawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Development processing apparatus
- Patent number 9,116,431
- Issue date Aug 25, 2015
- Kabushiki Kaisha Toshiba
- Masatoshi Terayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming pattern and method for producing original lithog...
- Patent number 8,951,698
- Issue date Feb 10, 2015
- Kabushiki Kaisha Toshiba
- Rikiya Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, manufacturing method of EUV mask, and...
- Patent number 8,908,150
- Issue date Dec 9, 2014
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Development method, method of manufacturing photomask, method of ma...
- Patent number 8,672,563
- Issue date Mar 18, 2014
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, manufacturing method of EUV mask, and...
- Patent number 8,383,298
- Issue date Feb 26, 2013
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus for processing a substrate
- Patent number 8,025,732
- Issue date Sep 27, 2011
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Development method, method of manufacturing photomask, and method o...
- Patent number 8,017,287
- Issue date Sep 13, 2011
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method, photomask manufacturing method, semiconduct...
- Patent number 7,608,368
- Issue date Oct 27, 2009
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, substrate treating method, and substrate treatin...
- Patent number 7,390,365
- Issue date Jun 24, 2008
- Kabushiki Kaisha Toshiba
- Masamitsu Itoh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method, substrate processing apparatus, and se...
- Patent number 7,354,869
- Issue date Apr 8, 2008
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method, substrate treating method, and substrate treatin...
- Patent number 7,094,522
- Issue date Aug 22, 2006
- Kabushiki Kaisha Toshiba
- Masamitsu Itoh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing method, substrate treating method, and substrate treatin...
- Patent number 7,001,086
- Issue date Feb 21, 2006
- Kabushiki Kaisha Toshiba
- Masamitsu Itoh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing method, substrate treating method, and substrate treatin...
- Patent number 6,929,903
- Issue date Aug 16, 2005
- Kabushiki Kaisha Toshiba
- Masamitsu Itoh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat treating method and heat treating apparatus
- Patent number 6,680,462
- Issue date Jan 20, 2004
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and processing method by use of the...
- Patent number 6,550,990
- Issue date Apr 22, 2003
- Kabushiki Kaisha Toshiba
- Hideaki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TEMPLATE AND MANUFACTURING METHOD THEREOF
- Publication number 20250013146
- Publication date Jan 9, 2025
- KIOXIA Corporation
- Takeharu MOTOKAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, MANUFACTURING METHOD OF SEMICOND...
- Publication number 20230307233
- Publication date Sep 28, 2023
- KIOXIA Corporation
- Noriko Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPLATE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20230296979
- Publication date Sep 21, 2023
- KIOXIA Corporation
- Takeharu MOTOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS, PLASMA TREATMENT METHOD, AND ORIGINAL P...
- Publication number 20230290619
- Publication date Sep 14, 2023
- KIOXIA Corporation
- Takeharu MOTOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20230260780
- Publication date Aug 17, 2023
- KIOXIA Corporation
- Minako INUKAI
- B08 - CLEANING
Information Patent Application
TEMPLATE AND MANUFACTURING METHOD THEREOF
- Publication number 20220291581
- Publication date Sep 15, 2022
- KIOXIA Corporation
- Takeharu MOTOKAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMATION METHOD AND TEMPLATE MANUFACTURING METHOD
- Publication number 20220206382
- Publication date Jun 30, 2022
- KIOXIA Corporation
- Noriko SAKURAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING TEMPLATE AND METHOD OF FORMING PATTERN
- Publication number 20210291408
- Publication date Sep 23, 2021
- KIOXIA Corporation
- Takeharu MOTOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20210238739
- Publication date Aug 5, 2021
- KIOXIA Corporation
- Ryu KOMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20210242042
- Publication date Aug 5, 2021
- Toshiba Memory Corporation
- Kosuke TAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD AND TEMPLATE MANUFACTURING METHOD
- Publication number 20210088906
- Publication date Mar 25, 2021
- KIOXIA Corporation
- Takeharu MOTOKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210080831
- Publication date Mar 18, 2021
- KIOXIA Corporation
- Ryu KOMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20200321212
- Publication date Oct 8, 2020
- Toshiba Memory Corporation
- Minako INUKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FREEZE CLEANING APPARATUS
- Publication number 20200156121
- Publication date May 21, 2020
- Toshiba Memory Corporation
- Hideaki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20200078833
- Publication date Mar 12, 2020
- Toshiba Memory Corporation
- Kosuke TAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20200078834
- Publication date Mar 12, 2020
- Toshiba Memory Corporation
- Mana TANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20190221452
- Publication date Jul 18, 2019
- Toshiba Memory Corporation
- Kosuke TAKAI
- B08 - CLEANING
Information Patent Application
FREEZE CLEANING APPARATUS
- Publication number 20180272391
- Publication date Sep 27, 2018
- Toshiba Memory Corporation
- Hideaki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180047566
- Publication date Feb 15, 2018
- Toshiba Memory Corporation
- Kyo OTSUBO
- B08 - CLEANING
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20180047565
- Publication date Feb 15, 2018
- Toshiba Memory Corporation
- Minako INUKAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PRODUCTION METHOD, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20170274427
- Publication date Sep 28, 2017
- Kabushiki Kaisha Toshiba
- Hideaki SAKURAI
- B08 - CLEANING
Information Patent Application
DUST COLLECTION APPARATUS AND DUST COLLECTION SYSTEM
- Publication number 20170072437
- Publication date Mar 16, 2017
- Kabushiki Kaisha Toshiba
- Hideaki SAKURAI
- B08 - CLEANING
Information Patent Application
PATTERN FORMATION METHOD, CONTROL DEVICE, AND SEMICONDUCTOR DEVICE...
- Publication number 20160259240
- Publication date Sep 8, 2016
- Kabushiki Kaisha Toshiba
- Keiko MORISHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD, AND TEMPLATE FOR NANOIMPRINT AND PRODUCING METHO...
- Publication number 20160077436
- Publication date Mar 17, 2016
- Kabushiki Kaisha Toshiba
- Hideaki SAKURAI
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
PATTERN FORMING METHOD, PHOTOMASK, AND TEMPLATE FOR NANOIMPRINT
- Publication number 20160068429
- Publication date Mar 10, 2016
- Kabushiki Kaisha Toshiba
- Masatoshi TERAYAMA
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
PATTERNING METHOD
- Publication number 20160068430
- Publication date Mar 10, 2016
- Kabushiki Kaisha Toshiba
- Machiko SUENAGA
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
SUBSTRATE STORING CASE, SUBSTRATE CLEANING APPARATUS AND SUBSTRATE...
- Publication number 20150258226
- Publication date Sep 17, 2015
- Kabushiki Kaisha Toshiba
- Yukio Oppata
- B08 - CLEANING
Information Patent Application
Surface State Evaluation Apparatus and Surface State Evaluation Method
- Publication number 20150092045
- Publication date Apr 2, 2015
- Kabushiki Kaisha Toshiba
- Shingo KANAMITSU
- G01 - MEASURING TESTING
Information Patent Application
PATTERN FORMING METHOD AND MASK PATTERN DATA
- Publication number 20150021295
- Publication date Jan 22, 2015
- Kabushiki Kaisha Toshiba
- Ryoji YOSHIKAWA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR FORMING PATTERN AND METHOD FOR PRODUCING ORIGINAL LITHOG...
- Publication number 20140087291
- Publication date Mar 27, 2014
- Kabushiki Kaisha Toshiba
- Rikiya TANIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hideaki SAKURAI

Person

Patents Grantslast 30 patents

Method of manufacturing template and method of forming pattern

Substrate processing method and substrate processing apparatus

Processing apparatus for processing substrates of different types

Method for cleaning substrate and cleaning device

Pattern forming method and template manufacturing method

Method for cleaning substrate and substrate processing apparatus

Substrate processing method, substrate processing apparatus, and co...

Substrate processing method, substrate processing apparatus, and co...

Freeze cleaning apparatus

Method for cleaning substrate and substrate processing apparatus

Substrate production method, substrate processing apparatus, and su...

Dust collection apparatus and dust collection system

Pattern formation method, control device, and semiconductor device...

Patterning method, and template for nanoimprint and producing metho...

Pattern forming method and mask pattern data

Development processing apparatus

Method for forming pattern and method for producing original lithog...

Substrate processing method, manufacturing method of EUV mask, and...

Development method, method of manufacturing photomask, method of ma...

Substrate processing method, manufacturing method of EUV mask, and...

Apparatus for processing a substrate

Development method, method of manufacturing photomask, and method o...

Pattern forming method, photomask manufacturing method, semiconduct...

Developing method, substrate treating method, and substrate treatin...

Substrate processing method, substrate processing apparatus, and se...

Developing method, substrate treating method, and substrate treatin...

Developing method, substrate treating method, and substrate treatin...

Developing method, substrate treating method, and substrate treatin...

Heat treating method and heat treating apparatus

Substrate processing apparatus and processing method by use of the...

Patents Applicationslast 30 patents

TEMPLATE AND MANUFACTURING METHOD THEREOF

ETCHING METHOD, ETCHING APPARATUS, MANUFACTURING METHOD OF SEMICOND...

TEMPLATE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

PLASMA TREATMENT APPARATUS, PLASMA TREATMENT METHOD, AND ORIGINAL P...

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

TEMPLATE AND MANUFACTURING METHOD THEREOF

PATTERN FORMATION METHOD AND TEMPLATE MANUFACTURING METHOD

METHOD OF MANUFACTURING TEMPLATE AND METHOD OF FORMING PATTERN

PROCESSING APPARATUS AND PROCESSING METHOD

PROCESSING APPARATUS

PATTERN FORMING METHOD AND TEMPLATE MANUFACTURING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

FREEZE CLEANING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...

PROCESSING APPARATUS

FREEZE CLEANING APPARATUS

METHOD FOR CLEANING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

SUBSTRATE PRODUCTION METHOD, SUBSTRATE PROCESSING APPARATUS, AND SU...

DUST COLLECTION APPARATUS AND DUST COLLECTION SYSTEM

PATTERN FORMATION METHOD, CONTROL DEVICE, AND SEMICONDUCTOR DEVICE...

PATTERNING METHOD, AND TEMPLATE FOR NANOIMPRINT AND PRODUCING METHO...

PATTERN FORMING METHOD, PHOTOMASK, AND TEMPLATE FOR NANOIMPRINT

PATTERNING METHOD

SUBSTRATE STORING CASE, SUBSTRATE CLEANING APPARATUS AND SUBSTRATE...

Surface State Evaluation Apparatus and Surface State Evaluation Method

PATTERN FORMING METHOD AND MASK PATTERN DATA

METHOD FOR FORMING PATTERN AND METHOD FOR PRODUCING ORIGINAL LITHOG...