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Hideaki Shimamura
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Yokohama, JP
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last 30 patents
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Patent Grant
Vacuum processing apparatus, and a film deposition apparatus and a...
Patent number
6,171,641
Issue date
Jan 9, 2001
Hitachi, Ltd.
Akira Okamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing device and film forming device and method using same
Patent number
5,815,396
Issue date
Sep 29, 1998
Hitachi, Ltd.
Hideaki Shimamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing equipment, film coating equipment and deposition...
Patent number
5,707,500
Issue date
Jan 13, 1998
Hitachi, Ltd.
Hideaki Shimamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering process and an apparatus for carrying out the same
Patent number
4,963,239
Issue date
Oct 16, 1990
Hitachi, Ltd.
Hideaki Shimamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus with film forming directivity
Patent number
4,724,060
Issue date
Feb 9, 1988
Hitachi, Ltd.
Masao Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for sputtering
Patent number
4,610,770
Issue date
Sep 9, 1986
Hitachi, Ltd.
Hiroshi Saito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Target for sputtering
Patent number
4,610,774
Issue date
Sep 9, 1986
Hitachi, Ltd.
Masao Sakata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...