Hideaki Udou

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,865,452
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Kotaro Oishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230005763
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160300710
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Kotaro Oishi
- B08 - CLEANING