Hideaki Yakushiji

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method
- Patent number 10,192,719
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Takamitsu Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evacuation method and vacuum processing apparatus
- Patent number 9,984,907
- Issue date May 29, 2018
- Tokyo Electron Limited
- Hirofumi Haga
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Evacuation method and storage medium
- Patent number 8,516,715
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting foreign materials and storage me...
- Patent number 8,243,265
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Tsuyoshi Moriya
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY SYSTEM, GAS CONTROL SYSTEM, PLASMA PROCESSING APPARATUS,...
- Publication number 20240212987
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING...
- Publication number 20220389584
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Ryutaro SUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20160196957
- Publication date Jul 7, 2016
- TOKYO ELECTRON LIMITED
- Takamitsu TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVACUATION METHOD AND VACUUM PROCESSING APPARATUS
- Publication number 20160189988
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Hirofumi HAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD FOR PLASMA PROCESSING APPARATUS
- Publication number 20150243489
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Hiroshi Uda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE BACKFLOW PREVENTING PART AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150170891
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Masanori TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DETECTING FOREIGN MATERIALS AND STORAGE ME...
- Publication number 20100118302
- Publication date May 13, 2010
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- G01 - MEASURING TESTING
Information Patent Application
EVACUATION METHOD AND STORAGE MEDIUM
- Publication number 20080301972
- Publication date Dec 11, 2008
- TOKYO ELECTRON LIMITED
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS

Hideaki Yakushiji

Person

Patents Grantslast 30 patents

Plasma processing method

Evacuation method and vacuum processing apparatus

Evacuation method and storage medium

Method and apparatus for detecting foreign materials and storage me...

Patents Applicationslast 30 patents

GAS SUPPLY SYSTEM, GAS CONTROL SYSTEM, PLASMA PROCESSING APPARATUS,...

SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING...

PLASMA PROCESSING METHOD

EVACUATION METHOD AND VACUUM PROCESSING APPARATUS

CLEANING METHOD FOR PLASMA PROCESSING APPARATUS

PARTICLE BACKFLOW PREVENTING PART AND SUBSTRATE PROCESSING APPARATUS

METHOD AND APPARATUS FOR DETECTING FOREIGN MATERIALS AND STORAGE ME...

EVACUATION METHOD AND STORAGE MEDIUM