Hideaki Yamasaki

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and tungsten film
- Patent number 12,227,843
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Takuya Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stress reducing method
- Patent number 12,221,693
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takuya Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead and substrate processing apparatus
- Patent number 12,188,125
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Takanobu Hotta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and film forming system
- Patent number 11,984,319
- Issue date May 14, 2024
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-coating method and film forming method
- Patent number 11,718,910
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Takeshi Itatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,414,742
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermocouple-fixing jig
- Patent number 11,150,142
- Issue date Oct 19, 2021
- Tokyo Electron Limited
- Hideaki Yamasaki
- G01 - MEASURING TESTING
Information Patent Grant
Film forming apparatus and gas injection member used therefor
- Patent number 11,069,512
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Shinya Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mounting table
- Patent number 10,968,514
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Kohichi Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Titanium silicide region forming method
- Patent number 10,903,086
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Hideaki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing a surface treatment on a mounting table, the m...
- Patent number 10,738,374
- Issue date Aug 11, 2020
- Tokyo Electron Limited
- Shinya Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus and operation method thereof
- Patent number 10,731,248
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removing silicon oxide film
- Patent number 10,546,753
- Issue date Jan 28, 2020
- Tokyo Electron Limited
- Hideaki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Purging method
- Patent number 10,519,542
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removing silicon oxide film
- Patent number 10,504,740
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Hideaki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing metal layers on germanium-containing films us...
- Patent number 9,330,936
- Issue date May 3, 2016
- Tokyo Electron Limited
- Toshio Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming TiN and storage medium
- Patent number 9,257,278
- Issue date Feb 9, 2016
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiN film forming method and storage medium
- Patent number 9,133,548
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming conformal metal silicide films
- Patent number 8,785,310
- Issue date Jul 22, 2014
- Tokyo Electron Limited
- Toshio Hasegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning powdery source supply system, storage medium, su...
- Patent number 8,389,053
- Issue date Mar 5, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material feeding device, film formation system and method for f...
- Patent number 8,029,621
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of film deposition
- Patent number 7,960,278
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CV method using metal carbonyl gas
- Patent number 7,879,399
- Issue date Feb 1, 2011
- Tokyo Electron Limited
- Tatsuo Hatano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of integrating metal-containing films into semiconductor dev...
- Patent number 7,674,710
- Issue date Mar 9, 2010
- Tokyo Electron Limited
- Shigeo Ashigaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film forming method and thin film forming device
- Patent number 7,482,283
- Issue date Jan 27, 2009
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning substrate processing chamber
- Patent number 7,456,109
- Issue date Nov 25, 2008
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD method for forming metal film by using metal carbonyl gas
- Patent number 7,427,426
- Issue date Sep 23, 2008
- Tokyo Electron Limited
- Tatsuo Hatano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transition metal thin film forming method
- Patent number 7,361,595
- Issue date Apr 22, 2008
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method
- Patent number 7,344,754
- Issue date Mar 18, 2008
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a passivated metal layer
- Patent number 7,189,431
- Issue date Mar 13, 2007
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STRESS REDUCING METHOD
- Publication number 20230227969
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Takuya KAWAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND TUNGSTEN FILM
- Publication number 20230227976
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Takuya KAWAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE SUPPRESSION METHOD
- Publication number 20230124029
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kazuki DEMPOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM...
- Publication number 20230062123
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Toshio TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220396875
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Takanobu HOTTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220396876
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Takuya KAWAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Film Forming System
- Publication number 20200258747
- Publication date Aug 13, 2020
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING METAL FILM AND FILM FORMING APPARATUS
- Publication number 20190385843
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20190371572
- Publication date Dec 5, 2019
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMOCOUPLE-FIXING JIG
- Publication number 20190301947
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- G01 - MEASURING TESTING
Information Patent Application
PRE-COATING METHOD AND FILM FORMING METHOD
- Publication number 20190218662
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Takeshi ITATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING TABLE
- Publication number 20190153597
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Kohichi SATOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Removing Silicon Oxide Film
- Publication number 20190027371
- Publication date Jan 24, 2019
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TITANIUM SILICIDE REGION FORMING METHOD
- Publication number 20180308709
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE FILM REMOVING METHOD, OXIDE FILM REMOVING APPARATUS, CONTACT...
- Publication number 20180261464
- Publication date Sep 13, 2018
- TOKYO ELECTRON LIMITED
- Takashi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180209033
- Publication date Jul 26, 2018
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PURGING METHOD
- Publication number 20180179627
- Publication date Jun 28, 2018
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER USED THEREFOR
- Publication number 20180047541
- Publication date Feb 15, 2018
- Shinya OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PERFORMING A SURFACE TREATMENT ON A MOUNTING TABLE, THE M...
- Publication number 20170204505
- Publication date Jul 20, 2017
- TOKYO ELECTRON LIMITED
- Shinya OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20170204518
- Publication date Jul 20, 2017
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20160240370
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150322571
- Publication date Nov 12, 2015
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING METAL LAYERS ON GERMANIUM-CONTAINING FILMS US...
- Publication number 20150132939
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Toshio Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING TiN AND STORAGE MEDIUM
- Publication number 20150004803
- Publication date Jan 1, 2015
- Hideaki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TiN FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20140206189
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RUTHENIUM FILM FORMATION METHOD AND COMPUTER READABLE STORAGE MEDIUM
- Publication number 20130230652
- Publication date Sep 5, 2013
- TOKYO ELECTRON LIMITED
- Yumiko KAWANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING CONFORMAL METAL SILICIDE FILMS
- Publication number 20130196505
- Publication date Aug 1, 2013
- TOKYO ELECTRON LIMITED
- Toshio Hasegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING W-BASED FILM, METHOD FOR FORMING GATE ELECTRODE,...
- Publication number 20100227459
- Publication date Sep 9, 2010
- TOKYO ELECTRON LIMITED
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING POWDERY SOURCE SUPPLY SYSTEM, STORAGE MEDIUM, SU...
- Publication number 20100136230
- Publication date Jun 3, 2010
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD FILM FORMING APPARATUS
- Publication number 20100064972
- Publication date Mar 18, 2010
- TOKYO ELECTRON LIMITED
- Hideaki YAMASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hideaki Yamasaki

Person

Patents Grantslast 30 patents

Film forming method and tungsten film

Stress reducing method

Showerhead and substrate processing apparatus

Substrate processing method and film forming system

Pre-coating method and film forming method

Substrate processing apparatus, substrate processing method, and st...

Thermocouple-fixing jig

Film forming apparatus and gas injection member used therefor

Substrate mounting table

Titanium silicide region forming method

Method of performing a surface treatment on a mounting table, the m...

Vacuum processing apparatus and operation method thereof

Method of removing silicon oxide film

Purging method

Method of removing silicon oxide film

Method for depositing metal layers on germanium-containing films us...

Method for forming TiN and storage medium

TiN film forming method and storage medium

Method of forming conformal metal silicide films

Method of cleaning powdery source supply system, storage medium, su...

Raw material feeding device, film formation system and method for f...

Method of film deposition

CV method using metal carbonyl gas

Method of integrating metal-containing films into semiconductor dev...

Thin film forming method and thin film forming device

Method for cleaning substrate processing chamber

CVD method for forming metal film by using metal carbonyl gas

Transition metal thin film forming method

Film formation method

Method for forming a passivated metal layer

Patents Applicationslast 30 patents

STRESS REDUCING METHOD

FILM FORMING METHOD AND TUNGSTEN FILM

PARTICLE SUPPRESSION METHOD

APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM...

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS

Substrate Processing Method and Film Forming System

METHOD OF FORMING METAL FILM AND FILM FORMING APPARATUS

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

THERMOCOUPLE-FIXING JIG

PRE-COATING METHOD AND FILM FORMING METHOD

SUBSTRATE MOUNTING TABLE

Method of Removing Silicon Oxide Film

TITANIUM SILICIDE REGION FORMING METHOD

OXIDE FILM REMOVING METHOD, OXIDE FILM REMOVING APPARATUS, CONTACT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

PURGING METHOD

FILM FORMING APPARATUS AND GAS INJECTION MEMBER USED THEREFOR

METHOD OF PERFORMING A SURFACE TREATMENT ON A MOUNTING TABLE, THE M...

VACUUM PROCESSING APPARATUS AND OPERATION METHOD THEREOF

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS

METHOD FOR DEPOSITING METAL LAYERS ON GERMANIUM-CONTAINING FILMS US...

METHOD FOR FORMING TiN AND STORAGE MEDIUM

TiN FILM FORMING METHOD AND STORAGE MEDIUM

RUTHENIUM FILM FORMATION METHOD AND COMPUTER READABLE STORAGE MEDIUM

METHOD OF FORMING CONFORMAL METAL SILICIDE FILMS

METHOD FOR FORMING W-BASED FILM, METHOD FOR FORMING GATE ELECTRODE,...

METHOD OF CLEANING POWDERY SOURCE SUPPLY SYSTEM, STORAGE MEDIUM, SU...

CVD FILM FORMING APPARATUS