Hideharu Kyouda

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 11,031,261
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 10,289,004
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 10,120,285
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus
- Patent number 10,014,190
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and storag...
- Patent number 9,947,556
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 9,575,411
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 9,568,829
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating film forming method, and...
- Patent number 9,214,363
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Hideharu Kyouda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 8,757,089
- Issue date Jun 24, 2014
- Tokyo Electron Limited
- Kouichi Hontake
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, coating treatment apparatus, and substr...
- Patent number 8,703,400
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Kenji Tsutsumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating and developing apparatus, coating film forming method, and...
- Patent number 8,518,494
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing device and developing method
- Patent number 8,445,189
- Issue date May 21, 2013
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, coating film removing apparatus, and su...
- Patent number 8,366,872
- Issue date Feb 5, 2013
- Tokyo Electron Limited
- Kenji Tsutsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 8,163,469
- Issue date Apr 24, 2012
- Tokyo Electron Limited
- Kouichi Hontake
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming apparatus and coating film forming method for...
- Patent number 8,111,372
- Issue date Feb 7, 2012
- Tokyo Electron Limited
- Hideharu Kyouda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method
- Patent number 8,110,325
- Issue date Feb 7, 2012
- Tokyo Electron Limited
- Takafumi Niwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, substrate processing system, and compu...
- Patent number 8,083,959
- Issue date Dec 27, 2011
- Tokyo Electron Limited
- Hideharu Kyouda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 8,037,890
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus and developing method
- Patent number 8,026,048
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Atsushi Ookouchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating film forming apparatus and method
- Patent number 7,959,988
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method, coating treatment apparatus, and substr...
- Patent number 7,926,441
- Issue date Apr 19, 2011
- Tokyo Electron Limited
- Kenji Tsutsumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing device and developing method
- Patent number 7,918,182
- Issue date Apr 5, 2011
- Tokyo Electronic Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Development device and development method
- Patent number 7,823,534
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Atsushi Ookouchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating and developing method, coating and developing system and st...
- Patent number 7,742,146
- Issue date Jun 22, 2010
- Tokyo Electron Limited
- Hideharu Kyouda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coater/developer and coating/developing method
- Patent number 7,665,916
- Issue date Feb 23, 2010
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing apparatus and heat processing method
- Patent number 7,601,933
- Issue date Oct 13, 2009
- Tokyo Electron Limited
- Kousuke Yoshihara
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,991,385
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,811,962
- Issue date Nov 2, 2004
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for development
- Patent number 6,709,174
- Issue date Mar 23, 2004
- Tokyo Electron Limited
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,496,245
- Issue date Dec 17, 2002
- Tokyo Electron Limited
- Hitoshi Kosugi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Liquid Processing Apparatus
- Publication number 20180308719
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20170090291
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20170045821
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20150036110
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20150036109
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...
- Publication number 20150027492
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150027503
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING FILM FORMING METHOD, AND...
- Publication number 20130293856
- Publication date Nov 7, 2013
- Hideharu KYOUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD AND APPARATUS USING ORGANIC-SOLVENT CONTAINING DE...
- Publication number 20120218531
- Publication date Aug 30, 2012
- TOKYO ELECTRON LIMITED
- Kouichi Hontake
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...
- Publication number 20120140191
- Publication date Jun 7, 2012
- TOKYO ELECTRON LIMITED
- Kouichi Hontake
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
- Publication number 20120061021
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Hideharu KYOUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20120006362
- Publication date Jan 12, 2012
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...
- Publication number 20110240597
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD
- Publication number 20110200923
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Takafumi NIWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...
- Publication number 20110155693
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING DEVICE AND DEVELOPING METHOD
- Publication number 20110127236
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS AND DEVELOPING METHOD
- Publication number 20100330508
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating and developing apparatus, coating and developing method, an...
- Publication number 20100232781
- Publication date Sep 16, 2010
- TOKYO ELECTRON LIMITED
- Kouichi Hontake
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING FILM FORMING APPARATUS AND COATING FILM FORMING METHOD FOR...
- Publication number 20100073647
- Publication date Mar 25, 2010
- TOKYO ELECTRON LIMITED
- Hideharu Kyouda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Development device and development method
- Publication number 20090130614
- Publication date May 21, 2009
- TOKYO ELECTRON LIMITED
- Atsushi Ookouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Processing Method
- Publication number 20090004607
- Publication date Jan 1, 2009
- Takeshi Shimoaoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...
- Publication number 20080176003
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...
- Publication number 20080176002
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Kenji TSUTSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
- Publication number 20080160781
- Publication date Jul 3, 2008
- TOKYO ELECTRON LIMITED
- Hideharu KYOUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND METHOD FOR IMMERSION LIGHT EXPOSURE
- Publication number 20080133045
- Publication date Jun 5, 2008
- TOKYO ELECTRON LIMITED
- Kouichi Hontake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING FILM FORMING APPARATUS AND METHOD
- Publication number 20080124489
- Publication date May 29, 2008
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE AND DEVELOPING METHOD
- Publication number 20080070167
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING FILM FORMING METHOD, AND...
- Publication number 20070212884
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING METHOD, COATING AND DEVELOPING SYSTEM AND ST...
- Publication number 20070184392
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Hideharu Kyouda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing device and developing method
- Publication number 20070184178
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hideharu Kyouda

Person

Patents Grantslast 30 patents

Liquid processing apparatus

Developing apparatus, developing method and storage medium

Developing method, developing apparatus and storage medium

Liquid processing apparatus

Substrate cleaning apparatus, substrate cleaning method, and storag...

Developing apparatus, developing method and storage medium

Developing method, developing apparatus and storage medium

Coating and developing apparatus, coating film forming method, and...

Coating and developing apparatus, coating and developing method, an...

Substrate treatment method, coating treatment apparatus, and substr...

Coating and developing apparatus, coating film forming method, and...

Developing device and developing method

Substrate treatment method, coating film removing apparatus, and su...

Coating and developing apparatus, coating and developing method, an...

Coating film forming apparatus and coating film forming method for...

Substrate treatment method

Substrate processing method, substrate processing system, and compu...

Substrate cleaning device and substrate cleaning method

Developing apparatus and developing method

Coating film forming apparatus and method

Substrate treatment method, coating treatment apparatus, and substr...

Developing device and developing method

Development device and development method

Coating and developing method, coating and developing system and st...

Coater/developer and coating/developing method

Heat processing apparatus and heat processing method

Method for developing processing and apparatus for supplying develo...

Method for developing processing and apparatus for supplying develo...

Apparatus and method for development

Developing method and developing apparatus

Patents Applicationslast 30 patents

Liquid Processing Apparatus

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...

LIQUID PROCESSING APPARATUS

COATING AND DEVELOPING APPARATUS, COATING FILM FORMING METHOD, AND...

DEVELOPING METHOD AND APPARATUS USING ORGANIC-SOLVENT CONTAINING DE...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...

SUBSTRATE TREATMENT METHOD

SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...

DEVELOPING DEVICE AND DEVELOPING METHOD

DEVELOPING APPARATUS AND DEVELOPING METHOD

Coating and developing apparatus, coating and developing method, an...

COATING FILM FORMING APPARATUS AND COATING FILM FORMING METHOD FOR...

Development device and development method

Substrate Processing Method

SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...

SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...

CLEANING APPARATUS AND METHOD FOR IMMERSION LIGHT EXPOSURE

COATING FILM FORMING APPARATUS AND METHOD

EXPOSURE AND DEVELOPING METHOD

COATING AND DEVELOPING APPARATUS, COATING FILM FORMING METHOD, AND...

COATING AND DEVELOPING METHOD, COATING AND DEVELOPING SYSTEM AND ST...

Developing device and developing method