Hidehiko Fujioka

Person

Yamato, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing system and device manufacturing method using the same
- Patent number 6,809,799
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Takayuki Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system and device manufacturing method using the same
- Patent number 6,406,245
- Issue date Jun 18, 2002
- Canon Kabushiki Kaisha
- Takayuki Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing system for semiconductor device manufacture of otherwise
- Patent number 5,871,587
- Issue date Feb 16, 1999
- Canon Kabushiki Kaisha
- Takayuki Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing System and semiconductor device production method using...
- Patent number 5,828,572
- Issue date Oct 27, 1998
- Canon Kabushiki Kaisha
- Takayuki Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system and device manufacturing method using the same
- Patent number 5,746,562
- Issue date May 5, 1998
- Canon Kabushiki Kaisha
- Takayuki Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveying device and method of controlling the same
- Patent number 5,641,264
- Issue date Jun 24, 1997
- Canon Kabushiki Kaisha
- Mitsutoshi Kuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask manufacturing method and apparatus and device manufacturing me...
- Patent number 5,593,800
- Issue date Jan 14, 1997
- Canon Kabushiki Kaisha
- Hidehiko Fujioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage mechanism in exposure apparatus
- Patent number 5,574,556
- Issue date Nov 12, 1996
- Canon Kabushiki Kaisha
- Tetsuzo Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring gas purity information, chamber unit and exposu...
- Patent number 5,467,637
- Issue date Nov 21, 1995
- Canon Kabushiki Kaisha
- Takayuki Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask structure
- Patent number 5,356,686
- Issue date Oct 18, 1994
- Canon Kabushiki Kaisha
- Hidehiko Fujioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus for vertically holding a substrate in a...
- Patent number 5,253,012
- Issue date Oct 12, 1993
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure control method for adjusting the temperature of a workpiec...
- Patent number 5,134,436
- Issue date Jul 28, 1992
- Canon Kabushiki Kaisha
- Hidehiko Fujioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask cassette and mask cassette loading device
- Patent number 5,026,239
- Issue date Jun 25, 1991
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for holding a mask
- Patent number 4,963,921
- Issue date Oct 16, 1990
- Canon Kabushiki Kaisha
- Takao Kariya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Processing system and device manufacturing method using the same
- Publication number 20020061245
- Publication date May 23, 2002
- TAKAYUKI HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND DEVICE MANUFACTURING METHOD USING THE SAME
- Publication number 20010041119
- Publication date Nov 15, 2001
- TAKAYUKI HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS

Hidehiko Fujioka

Person

Patents Grantslast 30 patents

Processing system and device manufacturing method using the same

Processing system and device manufacturing method using the same

Processing system for semiconductor device manufacture of otherwise

Processing System and semiconductor device production method using...

Processing system and device manufacturing method using the same

Substrate conveying device and method of controlling the same

Mask manufacturing method and apparatus and device manufacturing me...

Stage mechanism in exposure apparatus

Method of measuring gas purity information, chamber unit and exposu...

X-ray mask structure

Substrate holding apparatus for vertically holding a substrate in a...

Exposure control method for adjusting the temperature of a workpiec...

Mask cassette and mask cassette loading device

Device for holding a mask

Patents Applicationslast 30 patents

Processing system and device manufacturing method using the same

PROCESSING SYSTEM AND DEVICE MANUFACTURING METHOD USING THE SAME