Hidehiko Kawaguchi

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of removing polymer and apparatus for doing the same
- Patent number 7,064,079
- Issue date Jun 20, 2006
- NEC Electronics Corporation
- Hiroyuki Sonoda
- B08 - CLEANING
Information Patent Grant
Wet processing device with sensor-controlled conveyor
- Patent number 6,612,316
- Issue date Sep 2, 2003
- NEC Electronics Corporation
- Hidehiko Kawaguchi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20090236316
- Publication date Sep 24, 2009
- NEC Electronics Corporation
- Osamu ITOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for rinsing cleaned objects
- Publication number 20040099289
- Publication date May 27, 2004
- KAIJO CORPORATION
- Hidehiko Kawaguchi
- B08 - CLEANING
Information Patent Application
Method of removing polymer and apparatus for doing the same
- Publication number 20040009669
- Publication date Jan 15, 2004
- NEC ELECTRONICS CORPORATION
- Hiroyuki Sonoda
- B08 - CLEANING
Information Patent Application
Wet processing device
- Publication number 20010017148
- Publication date Aug 30, 2001
- Hidehiko Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS