Hidehiko Kozawa

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Itami, JP

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Patents Grantslast 30 patents

Information Patent Grant
Phase shift mask of attenuation type and manufacturing method thereof
- Patent number 6,048,647
- Issue date Apr 11, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of monitoring accuracy with which patterns are written
- Patent number 5,296,917
- Issue date Mar 22, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Haruhiko Kusonose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY