Hidehiko SATO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,705,374
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Joji Takayoshi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER POSITION ADJU...
- Publication number 20220310369
- Publication date Sep 29, 2022
- TOKYO ELECTRON LIMITED
- Joji TAKAYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313238
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Joji TAKAYOSHI
- H01 - BASIC ELECTRIC ELEMENTS