Hidehiro Kojiri

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming film stacks with reduced defects
- Patent number 11,145,504
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Zhijun Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RPS defect reduction by cyclic clean induced RPS cooling
- Patent number 10,755,903
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Sidharth Bhatia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a group III-nitride crystalline film on a pattern...
- Patent number 9,431,477
- Issue date Aug 30, 2016
- Applied Materials, Inc.
- Olga Kryliouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for improved growth of group III nitride semiconductor comp...
- Patent number 8,980,002
- Issue date Mar 17, 2015
- Applied Materials, Inc.
- Yuriy Melnik
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods for pretreatment of group III-nitride depositions
- Patent number 8,853,086
- Issue date Oct 7, 2014
- Applied Materials, Inc.
- Yuriy Melnik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for improved growth of group III nitride buffer layers
- Patent number 8,778,783
- Issue date Jul 15, 2014
- Applied Materials, Inc.
- Yuriy Melnik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a group III-nitride crystalline film on a pattern...
- Patent number 8,507,304
- Issue date Aug 13, 2013
- Applied Materials, Inc.
- Olga Kryliouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate pretreatment for subsequent high temperature group III de...
- Patent number 8,138,069
- Issue date Mar 20, 2012
- Applied Materials, Inc.
- Yuriy Melnik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING FILM STACKS WITH REDUCED DEFECTS
- Publication number 20200227258
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Zhijun JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RPS DEFECT REDUCTION BY CYCLIC CLEAN INDUCED RPS COOLING
- Publication number 20170207069
- Publication date Jul 20, 2017
- Applied Materials, Inc.
- Sidharth BHATIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A GROUP III-NITRIDE CRYSTALLINE FILM ON A PATTERN...
- Publication number 20130320353
- Publication date Dec 5, 2013
- Applied Materials, Inc.
- Olga Kryiouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRETREATMENT OF GROUP III-NITRIDE DEPOSITIONS
- Publication number 20120295428
- Publication date Nov 22, 2012
- Yuriy Melnik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR IMPROVED GROWTH OF GROUP III NITRIDE BUFFER LAYERS
- Publication number 20120295418
- Publication date Nov 22, 2012
- Yuriy Melnik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR IMPROVED GROWTH OF GROUP III NITRIDE SEMICONDUCTOR COMP...
- Publication number 20120291698
- Publication date Nov 22, 2012
- Yuriy Melnik
- C30 - CRYSTAL GROWTH
Information Patent Application
LIGHT EMITTING DIODE WITH ENHANCED QUANTUM EFFICIENCY AND METHOD OF...
- Publication number 20120235116
- Publication date Sep 20, 2012
- Jie Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PRETREATMENT FOR SUBSEQUENT HIGH TEMPERATURE GROUP III DE...
- Publication number 20120156863
- Publication date Jun 21, 2012
- Applied Materials, Inc.
- Yuriy Melnik
- C30 - CRYSTAL GROWTH
Information Patent Application
GROUP III-NITRIDE N-TYPE DOPING
- Publication number 20110263111
- Publication date Oct 27, 2011
- Yuriy Melnik
- C30 - CRYSTAL GROWTH
Information Patent Application
NANO-SPHERICAL GROUP III-NITRIDE MATERIALS
- Publication number 20110140071
- Publication date Jun 16, 2011
- Olga Kryliouk
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF FORMING A GROUP III-NITRIDE CRYSTALLINE FILM ON A PATTERN...
- Publication number 20110012109
- Publication date Jan 20, 2011
- Applied Materials, Inc.
- Olga Kryliouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING IN-SITU PRE-GaN DEPOSITION LAYER IN HVPE
- Publication number 20100279020
- Publication date Nov 4, 2010
- Applied Materials, Inc.
- Yuriy Melnik
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PRETREATMENT FOR SUBSEQUENT HIGH TEMPERATURE GROUP III DE...
- Publication number 20100273318
- Publication date Oct 28, 2010
- Applied Materials, Inc.
- Yuriy Melnik
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER PLASMA-CLEANING PROCESS SCHEME
- Publication number 20100024840
- Publication date Feb 4, 2010
- CHANG-LIN HSIEH
- B08 - CLEANING
Information Patent Application
IN-SITU CHAMBER CLEANING METHOD
- Publication number 20090114245
- Publication date May 7, 2009
- Hidehiro Kojiri
- B08 - CLEANING

Hidehiro Kojiri

Person

Patents Grantslast 30 patents

Method of forming film stacks with reduced defects

RPS defect reduction by cyclic clean induced RPS cooling

Method of forming a group III-nitride crystalline film on a pattern...

Methods for improved growth of group III nitride semiconductor comp...

Methods for pretreatment of group III-nitride depositions

Methods for improved growth of group III nitride buffer layers

Method of forming a group III-nitride crystalline film on a pattern...

Substrate pretreatment for subsequent high temperature group III de...

Patents Applicationslast 30 patents

METHOD OF FORMING FILM STACKS WITH REDUCED DEFECTS

RPS DEFECT REDUCTION BY CYCLIC CLEAN INDUCED RPS COOLING

METHOD OF FORMING A GROUP III-NITRIDE CRYSTALLINE FILM ON A PATTERN...

METHODS FOR PRETREATMENT OF GROUP III-NITRIDE DEPOSITIONS

METHODS FOR IMPROVED GROWTH OF GROUP III NITRIDE BUFFER LAYERS

METHODS FOR IMPROVED GROWTH OF GROUP III NITRIDE SEMICONDUCTOR COMP...

LIGHT EMITTING DIODE WITH ENHANCED QUANTUM EFFICIENCY AND METHOD OF...

SUBSTRATE PRETREATMENT FOR SUBSEQUENT HIGH TEMPERATURE GROUP III DE...

GROUP III-NITRIDE N-TYPE DOPING

NANO-SPHERICAL GROUP III-NITRIDE MATERIALS

METHOD OF FORMING A GROUP III-NITRIDE CRYSTALLINE FILM ON A PATTERN...

METHOD OF FORMING IN-SITU PRE-GaN DEPOSITION LAYER IN HVPE

SUBSTRATE PRETREATMENT FOR SUBSEQUENT HIGH TEMPERATURE GROUP III DE...

CHAMBER PLASMA-CLEANING PROCESS SCHEME

IN-SITU CHAMBER CLEANING METHOD