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Hidehiro Kojiri
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Narita, JP
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Patents Grants
last 30 patents
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Patent Grant
Precision dielectric etch using hexafluorobutadiene
Patent number
6,800,213
Issue date
Oct 5, 2004
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Dielectric etch process reducing striations and maintaining critica...
Patent number
6,432,318
Issue date
Aug 13, 2002
Applied Materials, Inc.
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Precision dielectric etch using hexafluorobutadiene
Publication number
20030036287
Publication date
Feb 20, 2003
Ji Ding
H01 - BASIC ELECTRIC ELEMENTS