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Hidehiro Komatsu

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  • Nagano, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck
    • Patent number 8,542,474
    • Issue date Sep 24, 2013
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE AND MANUFACTURING MET...
    • Publication number 20130148253
    • Publication date Jun 13, 2013
    • Shinko Electric Industries Co., Ltd.
    • Hidehiro KOMATSU
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20110096460
    • Publication date Apr 28, 2011
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi YONEKURA
    • H01 - BASIC ELECTRIC ELEMENTS