HIDEHIRO OKUTANI

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YOKOHAMA-SHI, JP

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Patents Grantslast 30 patents

Information Patent Grant
Production system for manufacturing semiconductor devices by lot
- Patent number 6,463,350
- Issue date Oct 8, 2002
- Kabushiki Kaisha Toshiba
- Etsuo Fukuda
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor product manufacturing execution system and semiconduc...
- Patent number 6,112,130
- Issue date Aug 29, 2000
- Kabushiki Kaisha Toshiba
- Etsuo Fukuda
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PRODUCTION SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICES BY LOT
- Publication number 20020013632
- Publication date Jan 31, 2002
- ETSUO FUKUDA
- G05 - CONTROLLING REGULATING