Hidehiro Yanagawa

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Dual loading port semiconductor processing equipment
- Patent number RE43023
- Issue date Dec 13, 2011
- Hitachi Kokusai Electric Inc.
- Takanobu Nakashima
- 414 - Material or article handling
Information Patent Grant
Semiconductor device producing apparatus and producing method of se...
- Patent number 7,198,447
- Issue date Apr 3, 2007
- Hitachi Kokusai Electric Inc.
- Kazuhiro Morimitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual loading port semiconductor processing equipment
- Patent number 6,641,350
- Issue date Nov 4, 2003
- HITACHI KOKUSAI ELECTRIC INC.
- Takanobu Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical furnace of a semiconductor manufacturing apparatus and a b...
- Patent number 5,902,103
- Issue date May 11, 1999
- Kokusai Electric Co., Ltd.
- Kiyohiko Maeda
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for supplying and discharging gas to and from semiconductor...
- Patent number 5,277,215
- Issue date Jan 11, 1994
- Kokusai Electric Co., Ltd.
- Hidehiro Yanagawa
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100154711
- Publication date Jun 24, 2010
- Hitachi Kokusai Electric Inc.
- Kiyohisa ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device producing apparatus and producing method of se...
- Publication number 20040052618
- Publication date Mar 18, 2004
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method for manufacturing a semic...
- Publication number 20020012581
- Publication date Jan 31, 2002
- Hitachi Kokusai Electric Inc.
- Shigeru Odake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual loading port semiconductor processing equipment
- Publication number 20010038783
- Publication date Nov 8, 2001
- Hitachi Kokusai Electric Inc.
- Takanobu Nakashima
- H01 - BASIC ELECTRIC ELEMENTS