Hidehiro Yanai

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,948,778
- Issue date Apr 2, 2024
- Kokusai Electric Corporation
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,530,481
- Issue date Dec 20, 2022
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,101,111
- Issue date Aug 24, 2021
- Kokusai Electric Corporation
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,763,084
- Issue date Sep 1, 2020
- Kokusai Electric Corporation
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,403,478
- Issue date Sep 3, 2019
- Kokusai Electric Corporation
- Hidehiro Yanai
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,287,684
- Issue date May 14, 2019
- Kokusai Electric Corporation
- Hidehiro Yanai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,911,580
- Issue date Mar 6, 2018
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,659,767
- Issue date May 23, 2017
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,508,546
- Issue date Nov 29, 2016
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,378,991
- Issue date Jun 28, 2016
- Hitachi Kokusai Electric Inc.
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,082,797
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric, Inc.
- Yukinori Aburatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate supporter and method of m...
- Patent number 9,076,644
- Issue date Jul 7, 2015
- Hitachi Kokusai Electric Inc.
- Masakazu Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,986,450
- Issue date Mar 24, 2015
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,925,562
- Issue date Jan 6, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,444,363
- Issue date May 21, 2013
- Hitachi Kokusai Electric Inc.
- Masakazu Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,923,380
- Issue date Apr 12, 2011
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, and method for manufacturing semico...
- Patent number 7,648,578
- Issue date Jan 19, 2010
- Hitachi Kokusai Electric Inc.
- Hideharu Itatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 7,579,276
- Issue date Aug 25, 2009
- Hitachi Kokusai Electric Inc.
- Hideharu Itatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20240212989
- Publication date Jun 27, 2024
- Kokusai Electric Corporation
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230416916
- Publication date Dec 28, 2023
- Kokusai Electric Corporation
- Hidehiro YANAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230073084
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220189801
- Publication date Jun 16, 2022
- Kokusai Electric Corporation
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210343507
- Publication date Nov 4, 2021
- Kokusai Electric Corporation
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210079525
- Publication date Mar 18, 2021
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210071297
- Publication date Mar 11, 2021
- Kokusai Electric Corporation
- Hidehiro YANAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200381221
- Publication date Dec 3, 2020
- Kokusai Electric Corporation
- Hidehiro YANAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180144908
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus
- Publication number 20160379848
- Publication date Dec 29, 2016
- Hitachi Kokusai Electric Inc.
- Yoshihiko YANAGISAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160079101
- Publication date Mar 17, 2016
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160024650
- Publication date Jan 28, 2016
- HITACHI KOKUSAI ELECTRIC INC.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160010210
- Publication date Jan 14, 2016
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150371832
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150221503
- Publication date Aug 6, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150214044
- Publication date Jul 30, 2015
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORTER AND METHOD OF M...
- Publication number 20140004710
- Publication date Jan 2, 2014
- Hitachi Kokusai Electric Inc.
- Masakazu Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20130012035
- Publication date Jan 10, 2013
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Placement Stage, Substrate Processing Apparatus and Metho...
- Publication number 20120329290
- Publication date Dec 27, 2012
- Hitachi Kokusai Electric Inc.
- Toshiya Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20120132228
- Publication date May 31, 2012
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100150687
- Publication date Jun 17, 2010
- Hitachi Kokusai Electric, Inc.
- Masakazu SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20100068895
- Publication date Mar 18, 2010
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20100068414
- Publication date Mar 18, 2010
- Hitachi Kokusai Electric Inc.
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20070264840
- Publication date Nov 15, 2007
- Hitachi Kokusai Electric Inc.
- Hideharu Itatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hidehiro Yanai

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Plasma processing apparatus and method of manufacturing semiconduct...

Substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and method of manufacturing semicond...

Method of manufacturing semiconductor device

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, substrate supporter and method of m...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, and method for manufacturing semico...

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORTER AND METHOD OF M...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

Substrate Placement Stage, Substrate Processing Apparatus and Metho...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate Processing Apparatus and Method of Manufacturing Semicond...