Hidehito Azumano

Person

  • Zama, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 11,437,224
    • Issue date Sep 6, 2022
    • Shibaura Mechatronics Corporation
    • Hidehito Azumano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 11,387,083
    • Issue date Jul 12, 2022
    • Shibaura Mechatronics Corporation
    • Hidehito Azumano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 11,387,082
    • Issue date Jul 12, 2022
    • Shibaura Mechatronics Corporation
    • Hidehito Azumano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and plasma processing method

    • Patent number 10,111,313
    • Issue date Oct 23, 2018
    • Shibaura Mechatronics Corporation
    • Takeharu Motokawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Plasma etching apparatus

    • Patent number 8,834,674
    • Issue date Sep 16, 2014
    • Kabushiki Kaisha Toshiba
    • Takeharu Motokawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Robot apparatus and processing apparatus provided therewith, ashing...

    • Patent number 8,434,993
    • Issue date May 7, 2013
    • Shibaura Mechatronics Corporation
    • Hidehito Azumano
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Robot apparatus and treating apparatus

    • Patent number 6,045,315
    • Issue date Apr 4, 2000
    • Shibaura Engineering Works Co., Ltd.
    • Hidehito Azumano
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents