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Plasma processing apparatus
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Patent number 11,437,224
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Issue date Sep 6, 2022
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Shibaura Mechatronics Corporation
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Hidehito Azumano
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 11,387,083
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Issue date Jul 12, 2022
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Shibaura Mechatronics Corporation
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Hidehito Azumano
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 11,387,082
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Issue date Jul 12, 2022
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Shibaura Mechatronics Corporation
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Hidehito Azumano
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma etching apparatus
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Patent number 8,834,674
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Issue date Sep 16, 2014
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Kabushiki Kaisha Toshiba
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Takeharu Motokawa
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Robot apparatus and treating apparatus
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Patent number 6,045,315
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Issue date Apr 4, 2000
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Shibaura Engineering Works Co., Ltd.
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Hidehito Azumano
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL