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Processing method of wafer
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Patent number 11,456,213
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Issue date Sep 27, 2022
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Disco Corporation
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Yoshiteru Nishida
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H01 - BASIC ELECTRIC ELEMENTS
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Method of processing a wafer
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Patent number 10,957,593
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Issue date Mar 23, 2021
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Disco Corporation
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Yoshiteru Nishida
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H01 - BASIC ELECTRIC ELEMENTS
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Electrostatic chuck
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Patent number 10,896,836
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Issue date Jan 19, 2021
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Disco Corporation
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Kenta Chito
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer processing method
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Patent number 10,790,192
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Issue date Sep 29, 2020
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Disco Corporation
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Yoshiteru Nishida
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Wafer processing method
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Patent number 10,790,193
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Issue date Sep 29, 2020
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Disco Corporation
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Yoshiteru Nishida
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H01 - BASIC ELECTRIC ELEMENTS
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Decompression processing apparatus
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Patent number 10,175,588
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Issue date Jan 8, 2019
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Disco Corporation
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Hidekazu Iida
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Etching method
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Patent number 9,812,292
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Issue date Nov 7, 2017
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Disco Corporation
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Hidekazu Iida
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H01 - BASIC ELECTRIC ELEMENTS