Hidekazu KIYAMA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 12,077,392
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Hitoshi Hashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,257,701
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Hidekazu Kiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method and non-trans...
- Patent number 9,082,800
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Suguru Enokida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,985,929
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Suguru Enokida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20210347584
- Publication date Nov 11, 2021
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20200111693
- Publication date Apr 9, 2020
- TOKYO ELECTRON LIMITED
- Hidekazu Kiyama
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20130078059
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANS...
- Publication number 20130078061
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS