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Hidekazu Ozawa
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Tokyo, JP
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last 30 patents
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Patent Grant
Method for polishing angular substrates
Patent number
6,790,129
Issue date
Sep 14, 2004
Shin-Etsu Chemical Co., Ltd.
Jiro Moriya
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Method for polishing angular substrates
Publication number
20030036340
Publication date
Feb 20, 2003
Jiro Moriya
B24 - GRINDING POLISHING