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Hideki Fujii
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Gunma-ken, JP
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last 30 patents
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Patent Grant
Electrostatic chuck and manufacturing method thereof
Patent number
7,679,880
Issue date
Mar 16, 2010
Shin-Etsu Chemical Co., Ltd.
Hideki Fujii
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF
Publication number
20070253138
Publication date
Nov 1, 2007
Hideki Fujii
H01 - BASIC ELECTRIC ELEMENTS