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Hideki Fukushima
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Defect inspection apparatus and pattern chip
Patent number
10,955,361
Issue date
Mar 23, 2021
HITACHI HIGH-TECH CORPORATION
Yuta Urano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect inspection device, pattern chip, and defect inspection method
Patent number
10,948,424
Issue date
Mar 16, 2021
HITACHI HIGH-TECH CORPORATION
Yuta Urano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect inspection method and device using same
Patent number
9,606,071
Issue date
Mar 28, 2017
Hitachi High-Technologies Corporation
Yukihiro Shibata
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Defect inspection method and device using same
Patent number
9,329,137
Issue date
May 3, 2016
Hitachi High-Technologies Corporation
Yukihiro Shibata
G01 - MEASURING TESTING
Information
Patent Grant
Contamination inspection method and contamination inspection device
Patent number
9,176,075
Issue date
Nov 3, 2015
Hitachi High-Technologies Corporation
Masanori Gunji
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting apparatus and defect inspecting method
Patent number
8,564,767
Issue date
Oct 22, 2013
Hitachi High-Technologies Corporation
Hideki Fukushima
G01 - MEASURING TESTING
Information
Patent Grant
Foreign matter inspection method and foreign matter inspection appa...
Patent number
8,422,009
Issue date
Apr 16, 2013
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Grant
Foreign matter inspection method and foreign matter inspection appa...
Patent number
7,986,405
Issue date
Jul 26, 2011
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Grant
Foreign matter inspection method and foreign matter inspection appa...
Patent number
7,719,671
Issue date
May 18, 2010
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
DEFECT INSPECTION APPARATUS AND PATTERN CHIP
Publication number
20200182804
Publication date
Jun 11, 2020
Hitachi High-Technologies Corporation
Yuta URANO
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION DEVICE, PATTERN CHIP, AND DEFECT INSPECTION METHOD
Publication number
20190107498
Publication date
Apr 11, 2019
Hitachi High-Technologies Corporation
Yuta URANO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFECT INSPECTION METHOD AND DEVICE USING SAME
Publication number
20160305893
Publication date
Oct 20, 2016
Hitachi High-Technologies Corporation
Yukihiro SHIBATA
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION METHOD AND DEVICE USING SAME
Publication number
20160011123
Publication date
Jan 14, 2016
Hitachi High-Technologies Corporation
Yukihiro SHIBATA
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTING APPARATUS AND DEFECT INSPECTING METHOD
Publication number
20130208270
Publication date
Aug 15, 2013
Hitachi High-Technologies Corporation
Hideki Fukushima
G01 - MEASURING TESTING
Information
Patent Application
CONTAMINATION INSPECTION METHOD AND CONTAMINATION INSPECTION DEVICE
Publication number
20120147364
Publication date
Jun 14, 2012
Masanori Gunji
G01 - MEASURING TESTING
Information
Patent Application
FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPA...
Publication number
20110267605
Publication date
Nov 3, 2011
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Application
FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPA...
Publication number
20100195095
Publication date
Aug 5, 2010
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Application
INSPECTING DEVICE AND INSPECTING METHOD
Publication number
20080297786
Publication date
Dec 4, 2008
Hitachi High-Technologies Corporation
Hideki Fukushima
G01 - MEASURING TESTING
Information
Patent Application
Foreign matter inspection method and foreign matter inspection appa...
Publication number
20070201019
Publication date
Aug 30, 2007
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for detecting defects
Publication number
20050264797
Publication date
Dec 1, 2005
Hiroyuki Nakano
G01 - MEASURING TESTING