Hideki Ina

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection apparatus and manufacturing method for semiconductor device
- Patent number 11,686,688
- Issue date Jun 27, 2023
- Canon Kabushiki Kaisha
- Kosuke Asano
- G01 - MEASURING TESTING
Information Patent Grant
Photoelectric converting device and apparatus
- Patent number 11,682,688
- Issue date Jun 20, 2023
- Canon Kabushiki Kaisha
- Keita Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,543,755
- Issue date Jan 3, 2023
- Canon Kabushiki Kaisha
- Takehiro Toyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus and equipment
- Patent number 11,332,409
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Yoshihisa Kawamura
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Photoelectric conversion device and manufacturing method of the sam...
- Patent number 10,403,667
- Issue date Sep 3, 2019
- Canon Kabushiki Kaisha
- Takashi Usui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 9,760,000
- Issue date Sep 12, 2017
- Canon Kabushiki Kaisha
- Hideki Ina
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Interferometer, lithography apparatus, and method of manufacturing...
- Patent number 9,625,836
- Issue date Apr 18, 2017
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, and method of manufacturing article
- Patent number 9,606,460
- Issue date Mar 28, 2017
- Canon Kabushiki Kaisha
- Yuichi Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 9,280,048
- Issue date Mar 8, 2016
- Canon Kabushiki Kaisha
- Hiroshi Sato
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography apparatus, lithography method, and method of manufactur...
- Patent number 9,257,262
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 9,122,149
- Issue date Sep 1, 2015
- Canon Kabushiki Kaisha
- Hiroshi Sato
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Light transmissive mold and apparatus for imprinting a pattern onto...
- Patent number 9,046,793
- Issue date Jun 2, 2015
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting apparatus and method therefor
- Patent number 9,039,402
- Issue date May 26, 2015
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Measuring apparatus, imprint system, measuring method, and device m...
- Patent number 8,976,370
- Issue date Mar 10, 2015
- Canon Kabushiki Kaisha
- Takahiro Miyakawa
- G01 - MEASURING TESTING
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 8,973,495
- Issue date Mar 10, 2015
- Canon Kabushiki Kaisha
- Kazuyuki Kasumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of manufacturing device, and substrate
- Patent number 8,922,774
- Issue date Dec 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method, imprint method, alignment apparatus, and position...
- Patent number 8,845,317
- Issue date Sep 30, 2014
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus, imprint method, and mold for imprint
- Patent number 8,845,318
- Issue date Sep 30, 2014
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern forming method and pattern forming apparatus in which a sub...
- Patent number 8,770,958
- Issue date Jul 8, 2014
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mold, imprint method, and process for producing a chip
- Patent number 8,668,484
- Issue date Mar 11, 2014
- Canon Kabushiki Kaisha
- Atsunori Terasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for producing a device using a mold
- Patent number 8,568,639
- Issue date Oct 29, 2013
- Canon Kabushiki Kaisha
- Atsunori Terasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for producing a chip using a mold
- Patent number 8,562,846
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Atsunori Terasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Surface shape measuring apparatus, exposure apparatus, and device m...
- Patent number 8,564,761
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,414,279
- Issue date Apr 9, 2013
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 8,404,169
- Issue date Mar 26, 2013
- Canon Kabushiki Kaisha
- Eigo Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Alignment method, exposure method, pattern forming method, and expo...
- Patent number 8,097,473
- Issue date Jan 17, 2012
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and mold for imprint
- Patent number 8,047,828
- Issue date Nov 1, 2011
- Canon Kabushiki Kaisha
- Nobuhito Suehira
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for producing a chip using a mold
- Patent number 7,981,304
- Issue date Jul 19, 2011
- Canon Kabushiki Kaisha
- Atsunori Terasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Surface shape measurement apparatus and exposure apparatus
- Patent number 7,952,725
- Issue date May 31, 2011
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Grant
Information processing apparatus for interference signal processing
- Patent number 7,924,426
- Issue date Apr 12, 2011
- Canon Kabushiki Kaisha
- Tomoyuki Miyashita
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT AND OPTICAL DESIGN METHOD
- Publication number 20240369737
- Publication date Nov 7, 2024
- Kowa Company, Ltd.
- Kentaro IWAMI
- G02 - OPTICS
Information Patent Application
OPTICAL DESIGN METHOD AND DIFFRACTIVE OPTICAL ELEMENT
- Publication number 20240202745
- Publication date Jun 20, 2024
- Kowa Company, Ltd.
- Hideki INA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COLOR FILTER ARRAY, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING...
- Publication number 20210305324
- Publication date Sep 30, 2021
- Canon Kabushiki Kaisha
- Yoshihisa Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210302842
- Publication date Sep 30, 2021
- Canon Kabushiki Kaisha
- Takehiro Toyoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20210199596
- Publication date Jul 1, 2021
- Canon Kabushiki Kaisha
- Kosuke Asano
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL APPARATUS AND EQUIPMENT
- Publication number 20200172443
- Publication date Jun 4, 2020
- Canon Kabushiki Kaisha
- Yoshihisa Kawamura
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PHOTOELECTRIC CONVERTING DEVICE AND APPARATUS
- Publication number 20200135793
- Publication date Apr 30, 2020
- Canon Kabushiki Kaisha
- Keita Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOELECTRIC CONVERSION DEVICE, IMAGING SYSTEM, MOVABLE APPARATUS,...
- Publication number 20180012921
- Publication date Jan 11, 2018
- Canon Kabushiki Kaisha
- Takashi Usui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160139510
- Publication date May 19, 2016
- Canon Kabushiki Kaisha
- Yuichi Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURIN...
- Publication number 20160124322
- Publication date May 5, 2016
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150362842
- Publication date Dec 17, 2015
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150364291
- Publication date Dec 17, 2015
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20150331331
- Publication date Nov 19, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN AR...
- Publication number 20150325404
- Publication date Nov 12, 2015
- Canon Kabushiki Kaisha
- Yusuke Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL DEVICE, LITHOGRAPHY APPARATUS AND MANUFACTURING METHOD OF A...
- Publication number 20150185623
- Publication date Jul 2, 2015
- Canon Kabushiki Kaisha
- Wataru YAMAGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING A...
- Publication number 20150155137
- Publication date Jun 4, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
DRAWING DATA CREATING METHOD, DRAWING APPARATUS, DRAWING METHOD, AN...
- Publication number 20150144807
- Publication date May 28, 2015
- Canon Kabushiki Kaisha
- Satoru Oishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFEROMETER, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20150022796
- Publication date Jan 22, 2015
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
IRRADIATION APPARATUS FOR IRRADIATING CHARGED PARTICLE BEAM, METHOD...
- Publication number 20140322833
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20140322831
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20140322655
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Toshihiko Nishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTU...
- Publication number 20140320836
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20140322654
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140234467
- Publication date Aug 21, 2014
- Canon Kabushiki Kaisha
- Hiroshi SATO
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20140168629
- Publication date Jun 19, 2014
- Canon Kabushiki Kaisha
- Toshihiko NISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING APPARATUS, IMPRINT SYSTEM, MEASURING METHOD, AND DEVICE M...
- Publication number 20140153003
- Publication date Jun 5, 2014
- Takahiro Miyakawa
- G01 - MEASURING TESTING
Information Patent Application
MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING CHIP
- Publication number 20140120199
- Publication date May 1, 2014
- Canon Kabushiki Kaisha
- Atsunori TERASAKI
- B82 - NANO-TECHNOLOGY
Information Patent Application
GENERATION METHOD, DESIGN METHOD, MANUFACTURING METHOD OF OPTICAL S...
- Publication number 20140107984
- Publication date Apr 17, 2014
- Canon Kabushiki Kaisha
- Wataru YAMAGUCHI
- G02 - OPTICS
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, CHARGED PARTICLE BEAM A...
- Publication number 20130265575
- Publication date Oct 10, 2013
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
DRAWING APPARATUS, REFERENCE MEMBER, AND METHOD OF MANUFACTURING AR...
- Publication number 20130230805
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Inspection apparatus and manufacturing method for semiconductor device

Photoelectric converting device and apparatus

Method of manufacturing semiconductor device

Optical apparatus and equipment

Photoelectric conversion device and manufacturing method of the sam...

Imprint apparatus, imprint method, and article manufacturing method

Interferometer, lithography apparatus, and method of manufacturing...

Lithography apparatus, and method of manufacturing article

Imprint apparatus and method of manufacturing article

Lithography apparatus, lithography method, and method of manufactur...

Imprint apparatus and method of manufacturing article

Light transmissive mold and apparatus for imprinting a pattern onto...

Imprinting apparatus and method therefor

Measuring apparatus, imprint system, measuring method, and device m...

Imprint apparatus, imprint method, and article manufacturing method

Method of manufacturing device, and substrate

Alignment method, imprint method, alignment apparatus, and position...

Imprint apparatus, imprint method, and mold for imprint

Pattern forming method and pattern forming apparatus in which a sub...

Mold, imprint method, and process for producing a chip

Process for producing a device using a mold

Process for producing a chip using a mold

Surface shape measuring apparatus, exposure apparatus, and device m...

Imprint apparatus and article manufacturing method

Imprint apparatus and method of manufacturing article

Alignment method, exposure method, pattern forming method, and expo...

Imprint apparatus, imprint method, and mold for imprint

Process for producing a chip using a mold

Surface shape measurement apparatus and exposure apparatus

Information processing apparatus for interference signal processing

Patents Applicationslast 30 patents

OPTICAL ELEMENT AND OPTICAL DESIGN METHOD

OPTICAL DESIGN METHOD AND DIFFRACTIVE OPTICAL ELEMENT

COLOR FILTER ARRAY, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

INSPECTION APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

OPTICAL APPARATUS AND EQUIPMENT

PHOTOELECTRIC CONVERTING DEVICE AND APPARATUS

PHOTOELECTRIC CONVERSION DEVICE, IMAGING SYSTEM, MOVABLE APPARATUS,...

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURIN...

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN AR...

OPTICAL DEVICE, LITHOGRAPHY APPARATUS AND MANUFACTURING METHOD OF A...

METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING A...

DRAWING DATA CREATING METHOD, DRAWING APPARATUS, DRAWING METHOD, AN...

INTERFEROMETER, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...

IRRADIATION APPARATUS FOR IRRADIATING CHARGED PARTICLE BEAM, METHOD...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTU...

LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD

MEASURING APPARATUS, IMPRINT SYSTEM, MEASURING METHOD, AND DEVICE M...

MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING CHIP

GENERATION METHOD, DESIGN METHOD, MANUFACTURING METHOD OF OPTICAL S...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, CHARGED PARTICLE BEAM A...

DRAWING APPARATUS, REFERENCE MEMBER, AND METHOD OF MANUFACTURING AR...